Vapor deposition device and vapor deposition method

Abstract

The invention relates to the technical field of thin film forming, in particular to a vapor deposition device and a vapor deposition method. The vapor deposition device comprises a storing mechanism,a conveying mechanism and an evaporation mechanism, the storing mechanism comprises a storing cavity and a storing heating unit, the upper end of the storing cavity is provided with a storing feedinginlet, the lower end of the storing cavity is provided with a storing discharging outlet, and the storing heating unit is used for heating solid materials into a molten state. The conveying mechanismcomprises a communicating device and a conveying heating unit, one end of the communicating device communicates with the storing discharging outlet, and the conveying heating unit heats the molten materials in the communicating device; and the evaporation mechanism comprises an evaporation cavity, the lower end of the evaporation cavity is provided with an evaporation feeding inlet communicating with the other end of the communicating device, and the upper end of the evaporation device is provided with an evaporation discharging outlet. The molten materials are converted into a gaseous state and discharged from the evaporation discharging outlet, in the process, the communicating device is in a dynamic balancing state all the time to guarantee that the materials cannot be pyrolyzed at a high temperature for a long time, and continuous batch production without opening the cavities can be ensured.

Description

technical field [0001] The invention relates to the technical field of film forming, in particular to an evaporation device and an evaporation method. Background technique [0002] At present, organic light-emitting diode (Organic Light-Emitting Diode, OLED for short) is also called organic electro-laser display, and evaporation equipment is usually used to prepare OLED screens. Evaporation equipment heats organic materials and metal materials and vaporizes them to form a coating on a glass substrate. There are two types of OLED materials after heating, the first type is direct sublimation, and the second type is melting first and then evaporating. [0003] For the second type of material that melts and then evaporates, the entire material in the crucible is usually heated. However, the long-term high-temperature environment has high requirements on the stability of the material. Long-term high-temperature heating of the material in a high-temperature environment may easil...

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Problems solved by technology

[0005] The purpose of the present invention is to provide an evaporation device to solve the problem that in the prior art, the material is easily cracked and deteriorated during the evaporation process and cannot be replenished in real time, and the material in the crucible or line source due to the change of the residual heat absorbs heat The power of the heating part and the control of the evaporation rate are complicated due to the quantity change.

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