Multi-level hand apparatus and conveying robot provided with the same

A multi-layer, hand-holding technology, applied in the direction of robots, conveyors, manipulators, etc.

Pending Publication Date: 2020-06-30
DAIHEN CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This problem is exacerbated by increasing the number of rests that work together

Method used

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  • Multi-level hand apparatus and conveying robot provided with the same
  • Multi-level hand apparatus and conveying robot provided with the same
  • Multi-level hand apparatus and conveying robot provided with the same

Examples

Experimental program
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Embodiment Construction

[0054] Preferred embodiments of the present invention will be specifically described below with reference to the drawings.

[0055] Such as figure 1 As shown, the multi-layered support A1 according to the present invention is mounted on, for example, an effector arm Ba of an articulated robot B1 to form a transfer robot B. As the transfer robot B, a transfer robot having any structure that controls the attitude of the tip of the actuator-equipped arm Ba to move it three-dimensionally can be used.

[0056] Figure 2 to Figure 9 Shown is a multi-layered handle A1 according to one embodiment of the present invention. This multi-layered holder A1 has: a storage box 10; a plurality of holders 20 arranged to overlap up and down; a guide unit 70 ( Figure 4 , Figure 9 ); The space constraint unit 50 ( Figure 9 ); and the lifting mechanism 60 that makes the handle (the first handle 20a) of the uppermost position lift.

[0057] In this embodiment, the holder 20 is configured to p...

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Abstract

The present disclosure provides a multistage hand apparatus and a transfer robot having the same and aims to make it possible for workpieces to be clamped and released more efficiently in a multi-level hand apparatus of a variable hand pitch. The multi-layer hand apparatus (A1) is provided with a plurality of hands (20) which are arranged in the vertical direction, and the distance between the hands (20) can be changed. Each hand (20) is provided with a clamp component (80a) for clamping a workpiece (W) and releasing the workpiece. In the multi-level hand apparatus (A1), the clamp components (80a) support the hands (20) so as to be capable of moving in the front-rear direction. Each clamp component (80a) further comprises a compression type spring member (804) interposed between a fixed spring holder member (803) formed on the front side and a movable spring holder member (81) provided on the rear side so as to be relatively movable in the front-rear direction. The moving spring holdermember (81) is driven in the front-rear direction and elastically contacts the front surface of a moving body (822) engaged with the clamp components (80a) so as to be relatively movable in the up-down direction with low resistance when moving in the rear direction.

Description

technical field [0001] The present invention relates to a multi-layered hand capable of transporting a plurality of plate-shaped workpieces and a transport robot equipped with the same. Background technique [0002] For example, Patent Document 1 describes a multi-layer support handle capable of conveying a plurality of plate-shaped workpieces such as semiconductor wafers at one time. The multi-level pallets described in these documents are configured so that the distance between the pallets can be changed in order to collectively convey workpieces between cassettes with different pitches. [0003] Patent Document 1 also describes a gripper mechanism for individually holding, in the multi-layered holders, workpieces mounted on each holder. This clamp mechanism has a spring on each holder that always biases the clamp members forward (clamp direction), and has a moving member that pulls each clamp member back simultaneously against the biasing force of the spring. . The mov...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677H01L21/687B25J9/04B25J15/00
CPCH01L21/67742H01L21/67781H01L21/68707B25J9/042B25J15/0014B65G2203/044B65G47/907B25J15/0052H01L21/67766H01L21/67259H01L21/67242B25J15/0095B65G47/90Y10S414/141Y10S901/30Y10S294/902
Inventor 笠原公博福间邦夫
Owner DAIHEN CORP
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