A high temperature shear test fixture for semiconductor chips

Abstract

The invention belongs to the field of shear strength test, and discloses a fixture for high temperature shear test of semiconductor chips, comprising a first fixture connector and a second fixture connector connected to an output actuating mechanism, the first fixture connector is connected to a substrate for fixing block, the second fixture connector is connected with a push head; the surface of the substrate fixing block is used to fix and install the substrate, and a semiconductor chip is attached to the surface of the substrate; a ceramic heating rod is arranged inside the substrate fixing block, and the ceramic heating rod is connected to an external temperature control box; The head is used to apply force to the semiconductor chip. The force end face of the push head is perpendicular to the substrate, the lower surface is parallel to the substrate, and the upper surface is a slope transition from the force end face to the end of the push head from bottom to top; the force application of the push head Glue strips are fixed on the end faces, and the glue strips are used for contacting the semiconductor chips. The invention can make the semiconductor chip be loaded by force-thermal coupling, precisely control the temperature, apply force uniformly, and ensure the reliability of the test.

Description

technical field

[0001] The invention belongs to the field of shear strength test, and in particular relates to a shear strength test fixture used for semiconductor chips. Background technique

[0002] For the installation quality of surface mount components, it can be carried out by three methods: welding visual inspection, shear force and metallographic section grinding. Among them, the shear strength test of the semiconductor chip is to use the measurement of the shear force applied to the chip and the observation of the failure type to determine the quality of the substrate on which the chip is attached.

[0003] In order to comply with the requirements of the method 2019.2 chip shear strength for chip contact tools in GJB548B-2005 "Test Methods and Procedures for Microelectronic Devices", the fixture in the test must ensure that the force is evenly applied to one edge of the chip, and at the same time the fixture is in contact with the chip The plane of is perpendicular...

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