Heating body and multi-region temperature-controlled vacuum furnace
A technology of heating body and vacuum furnace, applied in the direction of electric furnace heating, lighting and heating equipment, furnace, etc., can solve the problems of difficult temperature adjustment, difficult temperature adjustment, poor temperature uniformity of vacuum furnace, etc., achieve easy adjustment, improve full furnace goodness efficiency and cost savings
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specific Embodiment 1
[0075] Figure 8 It is the schematic diagram of the heating device of specific embodiment 1 of the present invention, Figure 9 It is a schematic diagram of a single heating body in the heating device of the specific embodiment 1 of the present invention, Figure 10 It is an expanded view of a single heating body in the heating device of Embodiment 1 of the present invention. combine Figure 8-Figure 10As shown, the heating sheet of the heating body in this embodiment is straight. Each of the first heating unit, the second heating unit and the third heating unit includes four straight heating chips. In this embodiment, the heating temperature control of six zones can be realized.
specific Embodiment 2
[0077] Figure 11 It is the schematic diagram of the heating device of specific embodiment 2 of the present invention, Figure 12 It is a schematic diagram of a single heating body in the heating device of the specific embodiment 2 of the present invention, Figure 13 It is an expanded view of a single heating body in the heating device of Embodiment 2 of the present invention. combine Figure 11-Figure 13 As shown, the heating fins of the heating body in this embodiment are plate-shaped, and each of the first heating unit, the second heating unit and the third heating unit includes two plate-shaped heating fins. In this embodiment, the heating temperature control of six zones can be realized.
specific Embodiment 3
[0079] Figure 14 It is the schematic diagram of the heating device of specific embodiment 3 of the present invention, Figure 15 It is a schematic diagram of a single heating body in the heating device of specific embodiment 3 of the present invention, Figure 16 It is an expanded view of a single heating body in the heating device of Embodiment 3 of the present invention. combine Figure 14-Figure 16 As shown, the heating chip of the heating body in this embodiment is frame-shaped, and each of the first heating unit, the second heating unit and the third heating unit includes two frame-shaped heating chips. In this embodiment, the heating temperature control of six zones can be realized.
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