Bismuth selenide oxide nanosheet photoelectric detector treated by oxygen plasma and preparation method

An oxygen plasma and photodetector technology, applied in semiconductor devices, circuits, electrical components, etc., can solve the problems of low carrier mobility, limited application range, non-uniform material properties, and low responsivity, etc. The effect of popularization and application, low cost and high switching ratio
CN111463295AInactive Publication Date: 2020-07-28HUAZHONG UNIV OF SCI & TECH
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
HUAZHONG UNIV OF SCI & TECH
Publication Date
2020-07-28
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention belongs to the related technical field of photoelectric detection and discloses an oxygen plasma treated bismuth oxyselenide nanosheet photoelectric detector and a preparation method. The preparation method comprises the following steps of (1) preparing a bismuth oxyselenide nanosheet on a substrate by using a chemical vapor deposition method; (2) preparing a pair of source-drain metal electrodes on the bismuth oxyselenide nanosheet by adopting a laser direct writing or electron beam exposure technology in combination with thermal evaporation and electron beam evaporation; and (3) carrying out oxygen plasma treatment of the bismuth oxyselenide nanosheet to obtain a bismuth oxyselenide nanosheet photoelectric detector. The preparation method is advantaged in that a plasma processing method is adopted, the preparation method is simple in process, easy to operate and relatively low in cost, is expected to be applied to large-scale improvement of performance of a bismuth oxyselenide nanosheet photoelectric detector, and lays a foundation for application of bismuth oxyselenide in the photoelectric detector.
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Description

technical field

[0001] The invention belongs to the technical field related to photoelectric detection, and more specifically relates to a bismuth selenium oxide nanosheet photodetector processed by oxygen plasma and a preparation method thereof. Background technique

[0002] The conversion technology of photoelectric signals has greatly affected daily life and has a wide range of applications, including visual imaging, optical communication, gas phase sensing and detectors, etc. Although the size and application range of photoelectric detection platforms are gradually expanding, the speed, In terms of efficiency, wavelength range, flexibility, transparency, and compatibility, there is an increasing demand for higher-performance photodetection.

[0003] Two-dimensional materials represented by graphene have many excellent electrical, optical, mechanical and thermal properties, especially in terms of photoelectric properties. Two-dimensional materials are likely to replace tr...

Claims

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