A test structure and test method of sot-mram
A technology of SOT-MRAM and test structure, applied in the field of test structure of SOT-MRAM, can solve the problems of large area, long test time, large test error, etc.
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Embodiment 1
[0035] refer to figure 1 , figure 2 and image 3 , the excitation circuit includes two second test electrodes 32 (denoted by electrode D and electrode E as two second test electrodes 32), and the above-mentioned two second test electrodes 32 are used to provide inversion for the n spin-orbit torque supply lines 20 current. Both ends of each spin-orbit torque providing wire 20 are respectively connected in series with the two second test electrodes 32 , and any two spin-orbit torque providing wires 20 are connected in parallel. The excitation circuit also includes two control switches 40 connected in series at both ends of each spin-orbit torque supply line 20 and used to control whether the two second test electrodes 32 and each spin-orbit torque supply line 20 are open or closed . By using n spin-orbit torque supply lines 20 connected in parallel, and a control switch 40 is provided at both ends of each spin-orbit torque supply line 20 . Therefore, when the n magnetic t...
Embodiment 2
[0043] refer to Figure 4 , Figure 5 and Image 6 , a series connection between the spin-orbit moment-providing wires 20 can also be used. Specifically, as Figure 4 As shown, between any two adjacent spin-orbit moment magnetic storage bits, the spin-orbit moment supply line 20 in one of the spin-orbit moment magnetic storage bits and the other spin-orbit moment magnetic storage bit The spin-orbit moment in provides lines 20 connected in series. The two first test electrodes 31 ( Figure 4 , Figure 5 , Image 6 The electrodes A and C in the two first test electrodes 31) are also connected in series with the two spin-orbit torque supply lines 20 located at the head and tail ends of the n spin-orbit torque supply lines 20, respectively, so as to provide n spin-orbit moment supply lines 20 in series. The track moment supply line 20 supplies the inversion current. The excitation circuit includes a control switch 40 disposed between any two adjacent spin-orbit torque supp...
Embodiment 3
[0051] Some of the n spin-orbit moment supply lines 20 may be connected in parallel, and some may be connected in series. The specific arrangement of the parallel connection of a plurality of spin-orbit moment supply lines 20 is the same as that in Embodiment 1, and the specific arrangement of the serial connection of a plurality of spin-orbit moment supply lines 20 is the same as that of Embodiment 2. It is not repeated here.
[0052] In addition, it should be noted that when specifically determining whether the n spin-orbit moment providing wires 20 are connected in series or in parallel, it can be determined according to the number of spin-orbit moment providing wires 20. When the number of orbital moment providing wires 20 is large, a parallel connection can be adopted, so as to ensure that the excitation voltages on each spin-orbit moment providing wire 20 are equal. When the number of spin-orbit torque supply lines 20 is small, a series connection can be adopted, thereb...
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