Anti-oxidation and heat-insulating ceramic coating and preparation method thereof
A ceramic coating and anti-oxidation technology, which is applied in the coating, metal material coating process, ion implantation plating, etc., can solve the problems of thermal barrier coating protection failure, easy peeling of the coating, etc., and achieve good oxidation resistance , reduced growth rate, large strain tolerance and thermal insulation effects
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Embodiment 1
[0033] After loading the cleaned K418 superalloy workpiece into the coating chamber, start the vacuum system to evacuate the coating chamber. When the vacuum of the back and bottom reaches 3.5×10 -3 When the Pa is below, argon gas is introduced into the coating chamber, and the workpiece is heated by the bombardment heat effect of the electron beam and the auxiliary heating device. The vacuum pressure is 0.2Pa, and the workpiece is rotated in the coating chamber at a rotation rate of 1rpm until the workpiece is heated to 400°C. ; Then feed hydrogen gas into the coating chamber, adjust the flow rate of argon gas, control the vacuum pressure to 0.2Pa, apply a bias voltage of -600V to the workpiece, and use Ar + and H + The workpiece is etched to remove surface adsorption and contamination, and the duration is 70 minutes. Adjust the argon flow to make the indoor pressure 9Pa, open the Ni 0.47 Cr 0.35 al 0.15 Si 0.02 Y 0.01 For the arc target power supply, set the arc curren...
Embodiment 2
[0035] After loading the cleaned K418 superalloy workpiece into the coating chamber, start the vacuum system to evacuate the coating chamber. When the vacuum of the back and bottom reaches 3.5×10 -3 When Pa is below, argon gas is introduced into the coating chamber, and the workpiece is heated by the bombardment heat effect of the electron beam and the auxiliary heating device. The vacuum pressure is 0.5Pa, and the workpiece is rotated in the coating chamber at a rotation rate of 2rpm until the workpiece is heated to 400°C. ; Then feed hydrogen gas into the coating chamber, adjust the flow rate of argon gas, control the vacuum pressure to 0.35Pa, apply a bias voltage of -600V to the workpiece, and use Ar + and H + The workpiece is etched to remove surface adsorption and contamination, and the duration is 60 minutes. Adjust the argon flow to make the indoor pressure 5Pa, open the Ni 0.40 co 0.20 Cr 0.28 al 0.10 Si 0.01 Y 0.01 For the arc target power supply, set the arc ...
Embodiment 3
[0037] After loading the cleaned 304 stainless steel workpiece into the coating chamber, start the vacuum system to evacuate the coating chamber. -3 When Pa is below, argon gas is introduced into the coating chamber, and the workpiece is heated by the bombardment heat effect of the electron beam and the auxiliary heating device. The vacuum pressure is 0.5Pa, and the workpiece is rotated in the coating chamber at a rotation rate of 2rpm until the workpiece is heated to 350°C. ; Then feed hydrogen gas into the coating chamber, adjust the flow rate of argon gas, control the vacuum pressure to 0.5Pa, apply a bias voltage of -600V to the workpiece, and use Ar + and H + Etching the workpiece to remove surface adsorption and contamination lasts for 90 minutes. Adjust the flow rate of argon gas so that the pressure in the chamber is 5Pa, open the Fe 0.40 Ni 0.15 Cr 0.3 al 0.15 Si 0.04 Y 0.01 For the arc target power supply, set the arc current to 100A, adjust the workpiece bias...
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