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Temperature control apparatus

A temperature adjustment device and temperature adjustment technology, applied in the application of thermometers, measuring devices, thermometers, etc., can solve the problems of product deformation, inability to accurately adjust the internal temperature of the product, and uneven temperature, and achieve the effect of ensuring uniformity.

Inactive Publication Date: 2020-08-14
POINT ENG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, there may be a problem that the temperature of the refrigerant introduced from the introduction part first flows toward the vicinity of the center and the peripheral part where it flows through the vicinity of the center, and the temperature inside the product cannot be accurately adjusted.
As a result, there are problems of deformation of the product due to uneven temperature inside the product and errors in the function of the product

Method used

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  • Temperature control apparatus
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Embodiment Construction

[0072] The following is merely illustrative of the principles of the invention. Therefore, even if it is not explicitly described or illustrated in this specification, those skilled in the art can realize the principle of the invention and invent various devices included in the concept and scope of the invention. In addition, all conditional terms and examples listed in this specification should be understood in principle only for the purpose of clearly understanding the concept of the invention, and should not be limited to the examples and states specifically listed above.

[0073] The above objects, features and advantages will be further clarified by the following detailed description related to the accompanying drawings, so those skilled in the art to which the invention pertains can easily implement the technical idea of ​​the invention.

[0074] Embodiments described in this specification will be described with reference to cross-sectional views and / or perspective views...

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PUM

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Abstract

The present invention relates generally to a temperature control apparatus capable of controlling the temperature of a product using a temperature control material. More particularly, the present invention relates to a temperature control apparatus capable of uniformly controlling the temperature of a product by reducing a temperature deviation of a temperature control material flowing inside theproduct.

Description

technical field [0001] The invention relates to a temperature regulating device which can control the temperature of a product by using a temperature regulating substance. Background technique [0002] In a technique for depositing a thin film on a semiconductor substrate or glass, etc., chemical vapor deposition (Chemical Vapor Deposition, CVD) or atomic layer deposition (Atomic Layer Deposition, ALD) using chemical reaction deposition is used. [0003] Such equipment that performs thin film deposition such as chemical vapor deposition or atomic layer deposition is used in the manufacture of semiconductor elements. In such thin film deposition equipment, in order to supply the reactive process fluid required to deposit the thin film on the wafer, a shower head is mainly provided in the chamber. The shower head functions to spray the reactive process fluid onto the wafer with the proper distribution required for thin film deposition. [0004] As such a shower head, what is...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/455C23C16/52F24H9/20F24H9/18F24H9/12
CPCC23C16/455C23C16/52F24H9/2007F24H9/1809F24H9/13H01L21/67109H01L21/67248C23C16/4557C23C16/45572C23C16/45565H01L21/67098H01L21/67276H01L21/67017G05D23/01G01K13/10H01L21/67063H01L21/76867F28F2250/08F28F13/10
Inventor 安范模
Owner POINT ENG