Process pipe with water cooled jackets at two ends

Abstract

The invention discloses a process pipe with water cooled jackets at two ends. The process pipe with the water cooled jackets at the two ends comprises a process pipe main body, the water cooled jackets, a water inlet and outlet nozzle, a back furnace door, a front furnace door, a sheet boat, a silicon wafer and an equipment rack body; the process pipe main body is fixedly mounted on the inner wallof the equipment rack body through front and back fixed flanges; and the water cooled jackets are fixedly mounted at the positions, near the equipment rack body, of the two ends of the process main body through the front and back fixed flanges. Through temperature of heat radiation generated by furnace mouths at two ends on the sealing position, the influence on a furnace door sealing ring as well as heat generated on the process pipe main body by a heater, cooling water inside flows rapidly to take away heat, so that heat influence on the furnace door sealing ring and a process pipe sealingring by heat conducted by the process pipe main body is blocked well, the temperature of the furnace door sealing ring and the process pipe sealing ring is maintained low, the sealing effect is guaranteed, and the service life of the furnace door sealing ring and the process pipe sealing ring is obviously prolonged.

Description

technical field [0001] The invention relates to the field of photovoltaic technology, in particular to a process tube with water cooling at both ends. Background technique [0002] The photovoltaic field is all in the form of tube furnace equipment (horizontal type). The way to protect the sealing ring of the furnace mouth is to set cooling water channels on the front and rear fixed flanges to cool the vicinity of the sealing ring to achieve the purpose. However, the sealing ring and the flange contact One side can have a cooling effect, but the side where the sealing ring contacts the process tube cannot be isolated due to the inevitable heat conduction of the process tube, so the entire annular surface of the sealing ring contacting the process tube is in a high temperature environment, so the sealing ring is very Fast aging and failure. Although it costs a lot to choose the material of the sealing ring and choose the material with high temperature resistance (the price of...

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Problems solved by technology

[0003] The object of the present invention is to provide a process tube with water cooling at both ends, to solve the problem in the above background technology that the heat conduction of the process tube must exist and cannot be isolated, so the entire annular surface of the sealing ring contacting the process tube is in a high temperature environment. Therefore, the sealing ring will quickly age and fail. Although it costs a lot to choose the material of the sealing ring to choose a material with high temperature resistance (the price of the material with high temperature resistance will be several times or ten times the price of ordinary sealing materials), but The service life is still low, because the failure of the sealing ring caused by the high temperature in the furnace and the heat transmitted to the sealing ring by the process tube cannot be solved

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