An Ultrasonic Vibration Assisted Vacuum Micro Evaporation Plating Equipment

Abstract

The invention discloses a vacuum micro-evaporation plating equipment assisted by ultrasonic vibration, which belongs to the technical field of evaporation equipment. A crucible, a manifold is arranged below the micro-deposition crucible; graphite heating electrodes are arranged around the micro-deposition crucible, and the graphite heating electrodes are connected to the manifold by a soft busbar; the interior of the manifold is provided with Ultrasonic vibration auxiliary system, the ultrasonic vibration auxiliary system includes a horn and a transducer arranged under the horn, the transducer is connected to the circuit in the manifold, and the horn is located in the micro-deposition crucible Directly below; the present invention uses graphite electrodes to directly heat the micro-deposition crucible, reducing electricity and heat energy loss, and making the internal temperature of the crucible uniform during the plating process.

Description

technical field [0001] The invention relates to the technical field of evaporation equipment, in particular to an ultrasonic vibration-assisted vacuum micro-evaporation equipment. Background technique [0002] With the continuous deepening of crossover between various disciplines, the continuous development of 5G and other communication technologies and the chip industry, the country's demand for the quantity and quality of electronic products is increasing day by day, and the thermal conductivity of traditional copper-based and aluminum-based alloy-based heat sink materials has gradually increased. Can't meet demand. The thermal conductivity of natural diamond can reach up to 2000W / m K. Under the current technical conditions, the thermal conductivity of artificial diamond can also reach 1000~1500W / m K. The diamond / copper composite material synthesized by diamond and copper Theoretically, it can reach a thermal conductivity of 1000W / m·K, but due to the poor wettability of d...

AI Technical Summary

Problems solved by technology

[0006] The present invention aims at the problem of non-uniform coating on the surface of diamond particles and non-uniform carbide layer in the vacuum micro-evaporation plating process existing in the prior art, and hereby provides an ultrasonic vibration-assisted vacuum micro-evaporation plating equipment. The vacuum micro-evaporation deposition equipment includes a heating system, a cooling system for cooling the heating chamber, an ultrasonic vibration auxiliary device, and an air pressure system providing vacuum conditions for the heating chamber, which solves the defects in the prior art

Images