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An Iterative Learning Control Method with Forgetting Factor for Synchronous Control

An iterative learning control and forgetting factor technology, applied in the field of motion control, can solve the problems that the motion control system does not have the ability of continuous improvement, and the control system cannot improve the synchronization performance, so as to improve the motion synchronization performance, improve the exposure effect, and accelerate the convergence speed effect

Active Publication Date: 2021-07-27
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

Although this method can improve the synchronization performance, the motion control system does not have the ability to continuously improve, especially for the situation with repetitive motion trajectories, the control system cannot gradually improve the synchronization performance according to the characteristics of the trajectory

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  • An Iterative Learning Control Method with Forgetting Factor for Synchronous Control
  • An Iterative Learning Control Method with Forgetting Factor for Synchronous Control
  • An Iterative Learning Control Method with Forgetting Factor for Synchronous Control

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Embodiment Construction

[0050] In order to make the purpose, features, and advantages of the application more obvious and understandable, the technical solutions in the embodiments of the application will be clearly and completely described below in conjunction with the drawings in the embodiments of the application. Obviously, the described The embodiments are only some of the embodiments of the present application, but not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of this application.

[0051] see figure 1 with figure 2 , figure 1 It is a schematic flowchart of an iterative learning control method with a forgetting factor for synchronous control provided by an embodiment of the present application, figure 2 A functional block diagram of the iterative control in the iterative learning control method with forgetting factor for synchronous control provided ...

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Abstract

An iterative learning control method with forgetting factor for synchronous control, applied to the technical field of motion control control, comprising: setting any motion system in a multi-axis motion system as an active system, and setting the remaining motion systems as a driven system ; Collect the position output of the active system and the driven system, and the first two input control variables of the driven system; use the position output of the active system and the driven system, and the first two input control variables of the driven system , and the preset forgetting factor to construct an iterative learning law; according to the iterative learning law, iteratively calculate the final input control amount of the driven system; according to the final input control amount of the driven system, adjust the driven system to make the driven system The system is synchronized with the active system. It can improve the synchronization performance between multi-axis motion systems, accelerate the convergence speed of iterative learning, and improve the robustness of the control algorithm.

Description

technical field [0001] The present application relates to the technical field of motion control, in particular to an iterative learning control method with a forgetting factor for synchronous control. Background technique [0002] The synchronous control problem of multi-axis motion system is a common motion control problem in the industry. For example, in the field of machine tool processing, multiple motion axes need to be controlled synchronously to complete complex workpiece processing trajectories; wafer exposure equipment, silicon wafer stage and mask stage must maintain a specific uniform motion relationship in the exposure scanning direction. The goal of synchronous control is generally to maintain a specific relationship between the positions or speeds of multiple synchronous axes, and the relative error is minimized. [0003] At present, the commonly used method in the industry is to calculate the synchronization deviation according to the position or speed relati...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B19/408
CPCG05B19/4086G05B2219/35356
Inventor 武志鹏李璟丁敏侠陈进新折昌美
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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