Thick film optical waveguide and method of making the same

Abstract

The present invention relates to a method for manufacturing a thick film waveguide. The manufacturing method of the thick-film optical waveguide includes the steps of: providing a substrate; performing multiple cycle steps to form a plurality of sub-waveguide layers arranged in a direction perpendicular to the substrate, and forming a plurality of sub-waveguide layers along a direction perpendicular to the substrate. a plurality of sub-filling layers arranged in a direction and covering the sidewalls of the sub-waveguide layers; the cycle step includes: depositing a waveguide core layer on the surface of the substrate; etching the waveguide core layer to form a through-waveguide layer In the trench of the core layer, the remaining waveguide core layer is used as a sub-waveguide layer; a sub-filling layer is formed in the trench, and the surface of the sub-filling layer and the surface of the sub-waveguide layer are jointly used as the bottom layer. Substrate surface for one cycle step. The invention overcomes the problems of cracking and warping caused by depositing a thick waveguide core layer at one time, reduces the transmission loss of the waveguide, and effectively improves the performance of the thick-film optical waveguide.

Description

technical field [0001] The present invention relates to the technical field of semiconductor manufacturing, and in particular, to a method for manufacturing a thick-film waveguide. Background technique [0002] An optical waveguide is a medium device that guides light waves to propagate in it, and is also called a medium optical waveguide. In the existing production process, there are mainly two ways to form thick-film optical waveguides: one is to deposit the waveguide material for many times and then dry etching to form it; the other is to form trenches in the lower cladding layer first, The trenches are then filled with waveguide material to form. However, the area without cracks in the thick-film optical waveguide obtained by the method of depositing the waveguide material for many times is small; in the method of trench filling, due to factors such as insufficiently steep sidewalls and insufficiently flat bottoms of the trenches, the resulting thick The roughness of t...

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Problems solved by technology

[0004] The invention provides a thick-film optical waveguide and a manufacturing method thereof, which are used to solve the problem that the thick-film optical waveguide is prone to cracks in the prior art, so as to improve the performance of the thick-film optical waveguide

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