Processing equipment process parameter optimization method and system
A technology of process parameter optimization and process parameters, applied in design optimization/simulation, manufacturing computing systems, data processing applications, etc., can solve the optimization goals that affect process parameter optimization, limited space for improving model accuracy, and inaccurate prediction model accuracy As expected and other issues
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[0084] In order to enable those skilled in the art to better understand the solutions of the embodiments of the present invention, the embodiments of the present invention will be further described in detail below in conjunction with the drawings and implementations.
[0085] The method and system for optimizing process parameters of processing equipment provided by the embodiments of the present invention fully consider the uncertainty of the quality index prediction model, predict the uncertainty range of the quality index, and further optimize the process parameters according to the uncertainty range of the quality index. Make the optimization result reach an acceptable probability level, thereby improving the accuracy and stability of the optimization result, and then obtain the optimal process parameters under the current incoming material information and environmental parameters.
[0086] Such as figure 1 As shown, it is a flow chart of the process parameter optimization...
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