A laser ultrasonic all-focus imaging detection device and method based on high-speed galvanometer cooperation

Abstract

The invention discloses a laser ultrasonic all-focus imaging detection device and method based on high-speed vibrating mirror cooperation. The detection device of the present invention includes a laser ultrasonic transmitting module that scans the two-dimensional focal plane, a laser ultrasonic receiving module that matches the laser ultrasonic transmitting module, and an industrial control module that simultaneously connects and cooperatively controls the laser ultrasonic transmitting module and the laser ultrasonic receiving module. The laser ultrasonic transmitting module is composed of a focusing galvanometer and a pulse laser. The laser ultrasonic receiving module is composed of a focusing galvanometer and a laser interferometer. The industrial control module is composed of a control card 1 and a control card 2 for the coordinated control of double focusing galvanometers. 1. Control software matched with two control cards, ultrasonic data acquisition card and all-focus imaging software. The invention can realize non-contact, high-efficiency and high-resolution ultrasonic three-dimensional all-focus imaging of internal defects of industrial parts.

Description

technical field [0001] The invention belongs to the field of non-destructive testing, and relates to a laser ultrasonic non-destructive testing technology, in particular to a laser ultrasonic full-focus imaging detection device and method based on high-speed galvanometer cooperation. Background technique [0002] Full-matrix phased-array ultrasonic imaging technology is an advanced detection technology developed in the past ten years. Its main principle is that firstly, the collection of full matrix data is realized by traversing all the transmitting array elements and receiving units, and then the imaging of the full matrix data is realized through virtual focusing technology, thereby improving the detection resolution and higher signal-to-noise ratio . However, since this method is based on piezoelectric ultrasonic sensors, it is necessary to ensure good coupling between the sensor and the surface of the workpiece to be inspected during detection. It is only used for cont...

AI Technical Summary

Problems solved by technology

However, the currently used phased array laser ultrasound method is based on a fixed fiber optical path difference, the phase cannot be adjusted in real time, the body wave detection cannot form a scanning beam with variable angles, and the detection coverage is limited. When the orientation of the beam and the defect is not good, it is easy to cause missed detection of defects and evaluation errors

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