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Gas sampling analysis device and method

An analysis device and gas sampling technology, applied in the field of measurement, can solve the problems of trace gas loss and lower gas analysis accuracy, and achieve the effects of increasing gas sampling volume, realizing non-destructive sampling analysis, and improving system response speed

Pending Publication Date: 2020-09-08
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

Common sampling methods include: volumetric sampling method, sampling valve, pipeline, micropore and membrane sampling, etc. The partial pressure ratio will change during the transmission of mixed gas from the high-pressure end to the low-pressure end, so that the actual measured gas composition and The composition of the gas source in the process chamber is different, and even part of the trace gas is lost, which reduces the accuracy of gas analysis

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  • Gas sampling analysis device and method
  • Gas sampling analysis device and method

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Embodiment Construction

[0037] The following description and drawings illustrate specific embodiments of the invention sufficiently to enable those skilled in the art to practice them.

[0038] It should be clear that the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0039] When the following description refers to the accompanying drawings, the same numerals in different drawings refer to the same or similar elements unless otherwise indicated. The implementations described in the following exemplary examples do not represent all implementations consistent with the present invention. Rather, they are merely examples of apparatuses and methods consistent with aspects of the invention as recited in the appended claims.

[0040] In the descriptio...

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Abstract

The invention discloses a gas sampling analysis device and method. The device comprises a vacuum acquisition module, a sampling module and a gas analysis module. The gas analysis module is respectively connected with the vacuum acquisition module and the sampling module; the vacuum acquisition module comprises a flow-limiting valve, and when the flow-limiting valve is opened and closed, the ultimate vacuum and the working vacuum of the gas analysis module are respectively realized. Therefore, with the adoption of the gas sampling analysis device and method, high-pressure, normal-pressure and vacuum gases can be analyzed on line; the gas sampling amount is increased, and the system response speed is increased; the molecular discrimination effect and pumping speed selectivity during gas sampling are eliminated, nondestructive sampling analysis and calibration of the gas sampling analysis device are achieved, so that the accuracy of a gas sampling analysis result is improved.

Description

technical field [0001] The invention relates to the field of measurement technology, in particular to a gas sampling and analysis device and method, which can be used for sampling and component analysis of high-pressure, normal-pressure and vacuum gases. Background technique [0002] In the field of industrial production, it is often necessary to analyze the gas composition, partial pressure and concentration of various process chambers to judge whether the content of each gas is within a reasonable range, and to feedback and control in time to ensure the normal operation of industrial production. For example: in urea synthesis, it is necessary to keep the ratio of ammonia and carbon dioxide in the synthesis tower within a certain range, so the concentration of ammonia and carbon dioxide needs to be analyzed. This reaction process is usually carried out under a high pressure environment, such as above 150 atmospheres. Another example is that gas lasers are widely used in in...

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Application Information

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IPC IPC(8): G01N27/62G01N1/24G01N33/00
CPCG01N27/62G01N1/24G01N33/0006G01N2001/248Y02A50/20
Inventor 王魁波吴晓斌罗艳谢婉露
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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