Mechanism for introducing utility line into vacuum chamber, film-forming apparatus and film-forming system

Abstract

The invention provides a mechanism for introducing a utility line into a vacuum chamber, a film-forming apparatus and a film-forming system. Even if the chamber deforms, a supporting mechanism deformsand the posture of an arm changes, the vacuum sealing performance of an arm connecting part can be maintained. The line introduction mechanism is provided with: a vapor deposition source capable of moving inside a vacuum chamber in which pressure can be reduced; a first rotating part which enables the first arm part to be connected with the inner wall of the vacuum chamber in a manner of rotatingaround a first shaft; a second rotating part which can enable the second arm part to be connected with the first arm part in a manner of rotating around a second shaft; a third rotating part which enables the second arm part to be connected with the evaporation source in a manner of rotating around a third shaft, wherein the third rotating part enables the utility line for operating a vapor deposition source to be connected to the vapor deposition source by being introduced through an introduction path having an airtight structure that communicates the interiors of the first to third rotatingparts and is connected to the outside of the vacuum chamber. The first rotating part connects the first arm part to the inner wall of the vacuum chamber so as to be swingable about an axis intersecting the first axis, and the third rotating part connects the second arm part to the vapor deposition source so as to be swingable about an axis intersecting the third axis.

Description

technical field [0001] The present invention relates to a mechanism for introducing a multifunctional line (Japanese: ユーティリティライン) typified by electric wiring and cooling medium piping, etc., from the outside of a vacuum chamber to a vapor deposition source etc. supported movably in the vacuum chamber. Furthermore, it relates to a film forming device and a film forming system equipped with a multifunctional pipeline introduction mechanism. Background technique [0002] In recent years, among self-luminous types, organic EL elements excellent in viewing angle, contrast, and response speed have been widely used in various display devices represented by wall-mounted televisions. [0003] Generally, an organic EL element is manufactured by carrying a substrate into a vacuum chamber and forming an organic film in a predetermined pattern on the substrate. More specifically, through the process of carrying the substrate into the film-forming chamber maintained in vacuum, the proces...

AI Technical Summary

Problems solved by technology

However, there is no study in Patent Document 2 on the reduction of the vacuum sealing performance of the connection part on the bottom surface of the vacuum chamber and the connection part with the vapor deposition source.

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