Multi-axis motion system of angular resolution scattering detection device and detection method

Abstract

The invention relates to a multi-axis motion system of an angular resolution scattering detection device and a detection method. The problems that in the prior art, an unloading structure is complex,and the requirement for the running speed of a motion control system is high are solved. A sample holder is fixedly arranged on a Y-axis translation stage of a three-dimensional translation stage of asample stage; the upper part of the table top of a manual rotating table of a one-dimensional rotating table is connected with the bottom of an X-axis translation table; an adjustable mounting base at the outer end of the table top of the manual rotating table is fixedly connected with a supporting plate; a supporting table is fixedly arranged on the table top of a large rotating table of a detector module; the annular plane of the supporting table is arranged on a stand column in a sleeving mode and clamped between the supporting plate and the large rotating table, one edge of the annular plane integrally extends out of a flat plate structure, and the scattering angle and the scattering azimuth angle are changed when the supporting table and the large rotating table move at the same time; and a supporting rod is vertically arranged at the end of the flat plate structure of the supporting table and provided with a clamp holder, the bottom of a small rotating table is fixedly connectedwith the clamp holder, the small table top is connected with one end of a detector arm, and a detector is fixed at the other end of the detector arm.

Description

technical field [0001] The invention relates to the technical field of scattering measurement, in particular to a multi-axis motion system and a detection method of an angle-resolved scattering detection device. Background technique [0002] With the development of optical technology, optical components, as an indispensable part of the optical system, have been widely used in various fields. In the era of rapid development of optical technology, the processing requirements for optical components are becoming more and more stringent. The quality evaluation of optical components mainly includes surface error, waviness and roughness, etc., which describe the degree of surface topography, as well as random distribution on the macroscopic surface, Discrete scratches, pitting and other defects. The scattering problem caused by optical surface defects has attracted more and more attention. When the light beam passes through an optical element or optical system with surface defects...

AI Technical Summary

Problems solved by technology

[0005] The present invention is to provide a multi-axis motion system and detection method of an angle-resolved scattering detection device to overcome the complex loading and unloading structure existing in the prior art and the need for motion control The problem of high operating speed requirements of the system

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