Automatic device for evaluating performance of large-area surface-enhanced Raman substrate

Abstract

The invention discloses an automatic device for evaluating the performance of a large-area surface enhanced Raman substrate, which comprises a Raman detection light path module, a control module, a clamping module and a data processing module, and the Raman detection light path module comprises a Raman probe for emitting a laser and detecting a sample substrate; the control module comprises a processor, an electric sliding table, a position sensor and a spectrograph; andthe electric sliding table can achieve relative movement of the sample substrate and the Raman probe in the X direction, theY direction and the Z direction. The automatic device disclosed by the invention can be used for evaluating the performance of the large-area surface-enhanced Raman substrate, and is applicable to various substrates such as glass, silicon wafers, paper, plastic and other flexible substrates; andaccording to the invention, large-area multi-point detection can be carried out, an automatic focusing function is also realized, defocusing in a mobile scanning process is prevented, and the accuracy of a detection result can be ensured.

Description

technical field [0001] The invention relates to the field of optical imaging technology, in particular to an automatic device for performance evaluation of large-area surface-enhanced Raman substrates. Background technique [0002] Raman detection is a method of qualitative or quantitative detection by detecting the Raman spectrum excited by the light source. When light hits a substance, a fraction of the photons are scattered inelastically, known as Raman scattering. During this process, energy is exchanged between some of the incident photons and the molecules, making the scattered photons have a different frequency than the incident photons. The frequency difference between the incident radiation and Raman scattering is called the Raman shift, which has nothing to do with the frequency of the incident light, but depends on the chemical composition and structural properties of the sample molecules. Combining Raman spectroscopy with the current rapidly developing nanotechn...

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Problems solved by technology

The above methods are carried out based on the optical platform of the microscope, which has a small measurement field of view and is expensive. It is usually only suitable for evaluating small-area substrates in the laboratory, and it is difficult to detect the measurement differences between substrates at the same time. It is more obvious on large-area SERS substrates such as industrial applications

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