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Wind speed sensor and preparation method thereof

A technology of wind speed sensor and temperature sensor, which is applied in the direction of instrumentation, acceleration measurement, multi-dimensional acceleration measurement, etc., can solve the problem of low sensitivity, achieve the effect of improving sensitivity, improving measurement accuracy, and reducing heating power

Active Publication Date: 2020-09-25
SHANGHAI INST OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a wind speed sensor and its preparation method in order to overcome the defect of low sensitivity in the above-mentioned prior art, so as to improve the measurement accuracy in the application scene of measuring low wind speed

Method used

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  • Wind speed sensor and preparation method thereof

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Embodiment

[0040] A wind speed sensor, comprising a speed measuring unit located in a confined space, the structure of the speed measuring element is as follows figure 1 As shown, the speed measurement unit includes a T-shaped heater 1 and a temperature measurement sensor 2 located in a closed space, and the speed measurement unit is placed in a closed cavity composed of a silicon substrate and a top packaging cover (not shown in the figure). The T-shaped heater 1 is a T-shaped structure. Two heating resistors are respectively arranged at both ends of the transverse part of the T-shaped structure. The two heating resistors are placed in the center of the two ends of the airtight cavity and connected by a cantilever beam 5, such as figure 1 The position 3 of the heating resistor in the middle is shown, and the specific shape of the heating resistor is not shown; the temperature measuring sensor 2 is arranged around the outside of the T-shaped structure, and two measuring sensors are respec...

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Abstract

The invention relates to a wind speed sensor, which comprises a speed measurement unit positioned in a closed space, and the speed measurement unit comprises a T-shaped heater and a temperature measurement sensor which are positioned in the closed space; and the T-shaped heater is of a T-shaped structure, and the two ends of the transverse portion of the T-shaped structure are each provided with two heating resistors. The temperature measuring sensor is arranged around the outer side of the T-shaped structure, and two temperature measuring resistors are arranged at the positions, located on the two sides of the middle vertical part of the T-shaped structure, of the temperature measuring sensor respectively; with the middle vertical part of the T-shaped structure as the symmetry axis, the two heating resistors are symmetrically arranged, and the two temperature measuring resistors are symmetrically arranged. Compared with the prior art, the sensor has the advantages of being small in size, high in sensitivity, high in practicability and the like.

Description

technical field [0001] The invention relates to the technical field of wind speed sensors, in particular to a wind speed sensor and a preparation method thereof. Background technique [0002] In various fields such as meteorology, environmental protection, aerospace, aviation and even daily life, fluids are inseparable. There are many kinds of fluid measurement methods, and the measurement conditions are basically the same for gas measurement, so it is particularly critical to choose an appropriate measurement method. Traditional wind speed sensors have disadvantages such as large size, easy to be affected by ambient temperature and pressure, and poor stability, which largely limit their application; and the sensitivity of traditional sensors is not high, resulting in high error in measurement results. is less effective. [0003] Chinese patent CN 107192849A discloses a design and a manufacturing method of a micro-mechanical acceleration sensor based on the heat convection...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P5/12G01P15/18G01P15/08
CPCG01P5/12G01P15/18G01P15/0897
Inventor 李以贵袁泉张成功金敏慧
Owner SHANGHAI INST OF TECH
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