Device fixing device and semiconductor laser testing equipment
A technology for fixing devices and devices, which is applied in the direction of single semiconductor device testing, measuring devices, electronic circuit testing, etc., can solve the problems of not being able to fix devices stably, and achieve the effects of stably fixing devices, increasing the pressure difference, and increasing the fixing pressure
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0035] see Figure 1-Figure 3 , shown is the device fixing device 100 in the first embodiment of the present invention, which includes a base 10, a plurality of sensing parts arranged on the top of the base 10, and a plurality of airway switch assemblies 30 arranged in the base 10, wherein:
[0036] The top of the base 10 is a device fixing platform. The top of the base 10 is provided with a number of adsorption holes 11. Each adsorption hole 11 is communicated with a vacuum pump (not shown) through its own vacuum channel 12, and the vacuum channel 12 is set. Inside the base 10 , that is, the vacuum channels 12 are holes or cavities opened on the base 10 , and the vacuum channels 12 of each adsorption hole 11 are independently arranged. Preferably, as figure 1 As shown, each adsorption hole 11 is evenly arranged in an array, so that the device 200 placed on the top of the base 10 can be better and more uniformly adsorbed and fixed.
[0037] Each suction hole 11 is correspond...
Embodiment 2
[0047] see Figure 4-Figure 7 , the device fixing device 100 in the second embodiment of the present invention is described. The device fixing device 100 in this embodiment is different from the device fixing device 100 in the first embodiment in that:
[0048] In this embodiment, as Figure 4 and Figure 5 As shown, the sensing component is a piezoelectric sensor 22 disposed on one side of the adsorption hole 11 . Specifically, a mounting hole 14 is opened on one side of the adsorption hole 11 , and the piezoelectric sensor 22 is installed in the mounting hole 14 . The airway switch assembly 30 includes: a piston 33 that seals and separates the suction hole 11 and the vacuum airway 12, a drive assembly 34 that drives the piston 33 to move, and a wire ( Image 6 and Figure 7 The control device 35 is electrically connected with the piezoelectric sensor 22 and the driving component 34; the piston 33 is provided with a communication hole 331, when the piezoelectric sensor 22 ...
Embodiment 3
[0056] A third embodiment of the present invention further provides a semiconductor laser testing equipment, including a device grabbing device, a vacuum pump, and a device fixing device, the device fixing device being the device fixing device described in any one of the foregoing Embodiments 1-2 100. The device grabbing device is used to grab the device to the device fixing device, and the vacuum pump is connected to the air channel of the device fixing device to generate a vacuum to adsorb and fix the device on the device fixing device, so as to facilitate the testing of the device, wherein the device is: Diode laser chips or bars.
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 


