Filter element cleaning device and method
A technology for cleaning devices and filter elements, applied in separation methods, chemical instruments and methods, filtration and separation, etc., can solve the problems of waste of raw materials, unrecoverable attachments of exhaust gas treatment filter elements, pollution, etc. Low, reducing the effect of environmental pollution
Pending Publication Date: 2020-10-09
紫石能源有限公司
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Problems solved by technology
[0006] The technical problem to be solved by the present invention is that the attachments of the existing tail gas treatment filter element cannot be recovered, and the landfill filter element is likely to cause waste of raw materials and environmental pollution.
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[0030] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0031] In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it can be mechanically conn...
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The invention relates to the technical field of tail gas treatment. The invention particularly relates to a filter element cleaning device and method. The filter element cleaning device comprises a recovery cavity, a rotating shaft assembly, a hammering assembly and a temperature control assembly, wherein the rotating shaft assembly, the hammering assembly and the temperature control assembly arearranged in the recovery cavity, the rotating shaft assembly is used for loading filter elements, the hammering assembly is arranged on the outer side of the rotating shaft assembly and used for hammering the surfaces of the filter elements, and the temperature control assembly is used for heating and cooling the recovery cavity. The device is simple in structure, simple to operate, low in cost and capable of being used on a large scale, a plurality of filter elements can be installed in the recovery cavity, recycled attachments can be marked according to different sources, recycled object impurities are few, purification is easy, recycling can be achieved after purification, waste of raw materials is reduced, environmental pollution caused by landfill is reduced, and high economic benefits and social benefits are achieved.
Description
technical field [0001] The invention relates to the technical field of tail gas treatment, in particular to a filter element cleaning device and method. Background technique [0002] Coating is the most important process in the semiconductor field. Special gas is used to react in MOCVD equipment or PECVD equipment to form semiconductor film layers or PN junctions with special requirements. With the development of the semiconductor industry, the demand for special gases is increasing, especially arsine, phosphine, silane, disilane, etc. These gases play a vital role in semiconductor production, but these special gases are in During production, the utilization rate is generally not high. For example, the general utilization rate of arsine is 7% to 15%, and the general utilization rate of phosphine is not more than 20%. Most of the process gases and reactants enter the tail gas treatment system. [0003] The tail gas treatment of these special gases and their reactants is gene...
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Login to View More IPC IPC(8): B01D41/04
CPCB01D41/04
Inventor 樊利宽张英
Owner 紫石能源有限公司