Technology for producing large-size quartz cylinder through continuous melting method, quartz cylinder and application of quartz cylinder

A quartz cylinder, large-scale technology, used in manufacturing tools, glass manufacturing equipment, glass molding, etc., can solve problems such as poor quality, difficult production, and inability to guarantee quality.

Active Publication Date: 2020-10-20
JIANGSU PACIFIC QUARTZ
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The material utilization rate of the above process is low, the cost is high, and the quality is poor due to the bubbles generated inside the quartz casting during the formation process
Especially large-sized quartz glass tubes a...

Method used

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  • Technology for producing large-size quartz cylinder through continuous melting method, quartz cylinder and application of quartz cylinder
  • Technology for producing large-size quartz cylinder through continuous melting method, quartz cylinder and application of quartz cylinder
  • Technology for producing large-size quartz cylinder through continuous melting method, quartz cylinder and application of quartz cylinder

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0059] The diameter of the quartz cylinder is 600mm, and the wall thickness is 60mm.

[0060] The step heating area refers to the formation of three areas from top to bottom in the continuous melting furnace, namely the preheating area, the melting area and the forming area. The temperature of the preheating area is 1650 ° C, and the temperature of the melting area is 2200°C, the temperature of the forming zone is 1800°C.

[0061] Choose k=D 2 *S / 1800000=12.

[0062] The moving speed of the quartz cylinder is v=(600 2 -480 2 ) / (12*1800)=6.3 cm / min.

[0063] The above temperature and rate can continuously produce quartz tubes with a diameter of 600mm and a wall thickness of 60mm. The produced quartz cylinder was continuously sampled at 10 cm to take 10 small samples for cross-sectional measurement, and no eccentricity occurred, and the inner diameter and outer diameter of the 10 small samples were compared, and the deviation was within 0.01%.

Embodiment 2

[0065] The diameter of the quartz cylinder is 300mm, and the wall thickness is 30mm.

[0066] The step heating area refers to the formation of three areas from top to bottom in the continuous melting furnace, namely the preheating area, the melting area and the forming area. The temperature of the preheating area is 1720 ° C, and the temperature of the melting area is 2250°C, the temperature of the forming zone is 1780°C.

[0067] K=D 2 *S / 1800000=1

[0068] The rate that described quartz cylinder moves downward is v=(300 2 -260 2 ) / (1*1780)=12.58 cm / min.

[0069] The above temperature and rate can continuously produce quartz tubes with a diameter of 300mm and a wall thickness of 30mm. The produced quartz cylinder was continuously sampled at 10 cm to take 10 small samples for cross-sectional measurement, and no eccentricity occurred, and the inner diameter and outer diameter of the 10 small samples were compared, and the deviation was within 0.01%.

Embodiment 3

[0071] The diameter of the quartz cylinder is 500 mm, and the wall thickness is 60 mm.

[0072] The step heating area refers to the formation of three areas from top to bottom in the continuous melting furnace, namely the preheating area, the melting area and the forming area. The temperature of the preheating area is 1730 ° C, and the temperature of the melting area is 2150°C, the temperature of the forming zone is 1795°C.

[0073] k(mm 2 *min) / (cm*℃)=500 2 *40 / 1800000(cm*mm*℃ / min)=5.55

[0074] The rate that described quartz cylinder moves downwards is v=(500 2 -420 2 ) / (5.55*1795)=7.38 cm / min.

[0075] The above temperature and rate can continuously produce quartz tubes with a diameter of 500mm and a wall thickness of 60mm. The produced quartz cylinder was continuously sampled at 10 cm to take 10 small samples for cross-sectional measurement, and no eccentricity occurred, and the inner diameter and outer diameter of the 10 small samples were compared, and the deviatio...

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Abstract

The invention discloses a process for producing a large-size quartz cylinder by a continuous melting method. The technology comprises the following steps: preheating a continuous melting furnace, adding raw materials, molding the quartz cylinder, and drawing the quartz cylinder to ensure that the quartz cylinder is slowly pulled out at a constant speed; adjusting the size of the quartz cylinder, wherein the pull-out rate of the quartz cylinder is changed by adjusting the upward supporting force and extrusion friction force between a quartz cylinder bearing mechanism and the quartz cylinder toobtain the quartz cylinder with the required size, the diameter of the quartz cylinder is 300-600 mm, and the wall thickness of the quartz cylinder is 20-100 mm; and cutting the quartz cylinder, namely cutting the quartz cylinder with stable output. The technology can be applied to semiconductor processing and high-temperature manufacturing fields.

Description

technical field [0001] The invention relates to the technical field of quartz tube processing, in particular to a process for producing large-sized quartz tubes by a continuous melting method, the quartz tube and applications thereof. Background technique [0002] Quartz is a mineral resource with very stable physical and chemical properties. The crystal belongs to the oxide mineral of the trigonal crystal system, that is, low-temperature quartz. [0003] As an important quartz product, the traditional process of quartz cylinders is to produce quartz casting anchors first, and then cut them to produce quartz cylinders. The material utilization rate of the above process is low, the cost is high, and the quality is poor due to the internal bubbles generated during the formation of the quartz casting. Especially large-sized quartz glass tubes are extremely difficult to produce, and the quality cannot be guaranteed. [0004] The continuous melting method in the industry has no...

Claims

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Application Information

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IPC IPC(8): C03B20/00
CPCC03B20/00
Inventor 陈士斌刘明伟钱卫刚周明强徐同根许志仁何茂乾陈加田
Owner JIANGSU PACIFIC QUARTZ
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