Accuracy calibration device and method for magnetorheological polishing equipment
A magneto-rheological polishing and calibration device technology, applied in grinding/polishing equipment, metal processing equipment, grinding automatic control devices, etc., can solve the problems of unstable removal function, limited processing accuracy, instability, etc., to achieve The effect of improving the accuracy of the motion track, improving the accuracy of the equipment, and ensuring the effectiveness
Active Publication Date: 2022-05-24
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology
The low accuracy of the motion trajectory leads to unstable or uncontrollable changes in the "polishing gap" between the magneto-rheological polishing wheel and the workpiece surface, which in turn leads to unstable or unpredictable changes in the removal function, which eventually manifests as a mechanical arm-based The processing accuracy of magnetorheological polishing equipment is limited, and there are typical low-frequency and intermediate-frequency errors introduced by the mechanical arm in the surface shape residual after processing
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[0039] In order to make the above objects, features and advantages of the present invention more clearly understood, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
[0040] In the following description, specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar promotions without departing from the connotation of the present invention. Accordingly, the present invention is not limited by the specific embodiments disclosed below.
[0041] Please refer to Figure 1 to Figure 5 , figure 1 A schematic structural diagram of a precision calibration device of a magnetorheological polishing equipment provided by a specific embodiment of the present invention; figure 2 for figure 1 A magnified image of area...
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The invention discloses a precision calibration device and method for magnetorheological polishing equipment, which can realize an automatic and rapid calibration process, and ensure that when the magnetorheological polishing equipment processes the surfaces of various optical workpieces, the polishing gap is kept within the allowable error range. Furthermore, the removal function is effectively controlled to reduce or eliminate the low-frequency and intermediate-frequency errors caused by the insufficient precision of the robot arm trajectory after processing, and improve the processing accuracy of the magnetorheological polishing equipment based on the robot arm.
Description
technical field [0001] The invention relates to the technical field of magnetorheological polishing equipment, in particular to a precision calibration device and method for magnetorheological polishing equipment. Background technique [0002] The moving carrier of the existing magnetorheological polishing equipment is mainly based on the multi-axis linkage CNC machining center. With the development of science and technology, the magnetorheological polishing module can be integrated on the manipulator, that is, the manipulator is used as the motion carrier of the magnetorheological polishing equipment, which has the advantages of large motion speed and acceleration, flexible motion and high processing efficiency. The same processing range, the cost is much lower than the multi-axis CNC machining center, and the floor area is small. [0003] However, compared with multi-axis CNC machine tools, the robot arm has the disadvantage of low motion trajectory accuracy, that is, the...
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IPC IPC(8): B24B49/00B24B1/00B24B13/00B24B51/00
CPCB24B49/00B24B1/005B24B13/00B24B51/00B24B47/22B24B31/112
Inventor 李龙响李兴昶艾博薛栋林张学军
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI