Ultrafast Laser Fabrication Method and System

Abstract

A laser fabrication method and a laser fabrication system, the laser fabrication system comprises: an ultrafast laser source (101), configured to output a laser beam; and a digital micromirror device(DMD) (106), configured to receive, shape, and scan the laser beam, wherein more than one binary holograms are synthesized to form a scanning hologram applied to the DMD (106). The shaped laser beams,containing one or multiple focal points, leaving the DMD (106) are focused to the sample for fast laser fabrication.

Description

[0001] Cross References to Related Applications [0002] This application claims priority to U.S. Provisional Application No. 62,639 / 245, filed March 6, 2018, the entire contents of which are incorporated herein by reference. technical field [0003] The present application relates to an ultrafast laser manufacturing system. Background technique [0004] Two-photon polymerization (Two-photon polymerization) is an important additive manufacturing method, which is usually performed in photoresist by raster scanning the focal point of a femtosecond laser, which induces a nonlinear absorption process to transform submicron features aggregated into nanoscale building blocks. Although nanoscale features can be additively created, the processing rate is limited by the serial scanning process point by point and layer by layer. Although parallel processing methods have been proposed, such as those using microlens arrays or spatial light modulator processing, they are often limited ...

AI Technical Summary

Problems solved by technology

Although capable of additively creating nanoscale features, the processing rate is limited by the point-by-layer serial scanning process

While parallel processing methods have been proposed, such as those using microlens arrays or spatial light modulator processing, they are often limited in fabricating periodic structures or have compromised resolution

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