Amorphous crsicn coating and its preparation method, application, conductive film and electronic device

An amorphous, conductive film technology, applied in the direction of application, coating, metal material coating technology, etc., can solve the problems of inability to meet the needs of intelligent electronic equipment, poor hardness and wear resistance, and reduced service life, and achieve the goal of coating The structure is compact, the corrosion resistance is resistant, and the effect of improving the service life

Active Publication Date: 2022-07-12
VITALNK IND SHENZHEN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The common types of conductive films on the market today are mostly pure metal conductive films such as Ni, Cr, Cu, Pt, Au, Al or metal oxide conductive films such as ITO, AZO, SnO, etc., and their structures are metal oxide crystals or metal crystals. The structure, hardness and wear resistance are poor, and the color is single, which can no longer meet the needs of smart electronic devices
As a multi-component hard film, CrSiCN has good wear resistance and electrical conductivity. However, most CrSiCN coatings prepared by traditional PVD have a polycrystalline structure and a columnar morphology. Diffusion channel
In the field of smart wear, especially in the environment where the sensor is in contact with the skin for a long time, the conductive coating on the surface of the sensor will be in contact with corrosive substances such as sweat and chemical corrosion liquid (hand cream, alcohol) for a long time, and the corrosive particles will Diffusion to the substrate along the internal structural defects of the coating, especially the penetrating grain boundary from the coating surface to the substrate, causing the sensor to be corroded, thereby reducing its service life

Method used

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  • Amorphous crsicn coating and its preparation method, application, conductive film and electronic device
  • Amorphous crsicn coating and its preparation method, application, conductive film and electronic device
  • Amorphous crsicn coating and its preparation method, application, conductive film and electronic device

Examples

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preparation example Construction

[0045] An embodiment of the present invention provides a method for preparing an amorphous CrSiCN coating, including the following step S100.

[0046] S100. Under vacuum conditions, a CrSi alloy target is used as the target material, and inert gas, C 2 H 2 and N 2 , carry out vapor deposition to obtain amorphous CrSiCN coating;

[0047] Wherein, the above-mentioned vapor deposition adopts ion source-assisted deposition.

[0048] The technical personnel of the present invention have taken a new approach on the basis of previous research, using rSCi alloy target as the target material, feeding inert gas, C 2 H 2 and N 2 , and vapor deposition is performed to obtain an amorphous CrSiCN coating; wherein, the vapor deposition adopts ion source-assisted deposition. Using CrSi alloy target, with C 2 H 2 and N 2 After the reaction, the amorphous CrSiCN coating is obtained by deposition, which can avoid the formation of crystalline CrSiCN with columnar morphology, and the use ...

Embodiment 1～4

[0090] The process conditions of Examples 1 to 4 are basically the same, and the only difference is that in step 4) the atomic ratio of Cr and Si in the CrSi alloy target (referred to as Cr:Si), the specific atomic ratio is shown in Table 1. The obtained amorphous For CrSiCN coating, please refer to appendix figure 1 ,Specific steps are as follows.

[0091] 1) Provide a base material 210, the base material 210 includes a front surface 211 and a reverse surface 212, the material of the base material 210 is glass, and the following coating operations are performed on the front and back sides respectively. The front surface 211 is the skin contact surface of the smart wearable device, and the front surface 211 is the electrical signal reading surface.

[0092] 2) Plasma cleaning of the substrate 210 in a vacuum environment: the substrate 210 is placed in a vacuum environment in a PVD furnace for ion cleaning, and the ion cleaning process parameters: the vacuum pressure is not hi...

Embodiment 5

[0096] Example 5 is basically the same as Example 1, except that in step 4) of Example 5, a CrSi alloy target and a hot isostatic Cr target are used for mixed sputter deposition. Among them, the target power of the hot isostatic pressing Cr target is 1kW, and the other process parameters are the same as those in Example 1.

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Abstract

The invention relates to an amorphous CrSiCN coating and a preparation method, application and conductive film thereof; wherein, in the preparation method of the amorphous CrSiCN coating, under vacuum conditions, a CrSi alloy target is used as the target material, and an inert gas is introduced into it. , C 2 H 2 and N 2 , and vapor deposition is performed to obtain an amorphous CrSiCN coating; wherein, the vapor deposition adopts ion source-assisted deposition. This method can avoid the formation of crystalline CrSiCN with a columnar morphology, and the use of ion source-assisted deposition can further improve the compactness of the film layer, make the coating structure compact, and further improve the corrosion resistance, wear resistance and hardness of the coating. ; The obtained amorphous CrSiCN coating is applied to various electronic equipments, which can improve its wear resistance, anticorrosion resistance and hardness, thereby increasing its service life.

Description

technical field [0001] The present invention relates to the technical field of electronic equipment, in particular to an amorphous CrSiCN coating and its preparation method, application, conductive film and electronic equipment. Background technique [0002] With the advent of the wave of intelligence, smart wearable devices have ushered in a period of rapid development, and wearable electronic devices have emerged in an endless stream, such as smart bracelets, smart watches, smart rings, etc. At the same time, the functions of the products themselves are also constantly improving, such as more and more wearable electronic devices. More and more products are equipped with vital signs health detection functions such as heart rate monitoring, blood pressure measurement, and sleep detection. [0003] At present, wearable smart electronic body-back products are based on the following principles for heart rate monitoring: (1) It is a vibration-based monitoring method, which recor...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34C23C14/06C23C14/54C23C14/02C23C14/18A61B5/0245A61B5/263
CPCC23C14/0057C23C14/0664C23C14/54C23C14/025C23C14/022C23C14/185C23C14/0015A61B5/0245A61B5/6802
Inventor 王强晏柱薛涛
Owner VITALNK IND SHENZHEN
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