Preparation method and application of a chip type micro filter capacitor
A filter capacitor and chip type technology, which is used in the preparation of chip micro filter capacitors. With the help of micro-nano processing technology to customize the field of chip micro filter capacitors, it can solve the problem that the fixed connection method is not reliable and stable enough, and it is inconvenient to lead. The problems of bonding with the circuit board, such as conduction, micro-short circuit, and low ion transfer efficiency, can achieve stable and reliable integration effects, broaden the characteristic parameters and application scope, and improve the effect of space utilization.
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[0051] The 3D silicon-based capacitor includes a 3D silicon-based frame 100 , a current collector 101 , an active material 102 , an encapsulation case (including a supporting encapsulation case lower part 103 a and an encapsulation case upper part 103 b ), electrolyte 104 , conductive pins 105 and a circuit board 106 . Its preparation method may comprise the following steps:
[0052] 1. Fabrication of the 3D silicon-based frame 100 . Silicon wafers are used for semiconductor patterning processing to form a pair of comb-shaped electrodes, which serve as the overall 3D frame of the capacitor, such as figure 1 As shown, wherein, the length, width and height of the comb teeth can be flexibly designed and selectively designed on demand. The present invention aims to design miniaturized capacitors. Can;
[0053] Two, the conductive carbon material is used as the making of current collector 101, such as figure 1 shown. For this high aspect ratio 3D frame, the current collector 10...
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