An automatic temperature balance system for aluminum anodizing bath
An anodic oxidation tank and automatic balancing technology, which is applied in general control systems, control/regulation systems, and electric temperature control, etc., to achieve low-cost effects
Active Publication Date: 2021-07-13
合肥微睿科技股份有限公司
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Problems solved by technology
[0008] The purpose of the present invention is to provide an automatic temperature balance system for aluminum anodizing tanks to solve the problems existing in the prior art when adjusting the temperature of the tank liquid in anodizing tanks based on temperature data using a single-tube adjustment method
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[0023] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0024] Such as figure 1 Shown, a kind of aluminum anodizing bath liquid temperature automatic balance system, comprises PLC controller 9, temperature sensor 10, and two sets of gas stirring systems 11; Detect the temperature of the uppermost layer of the tank liquid in the anodizing tank 1; two sets of gas stirring systems 11 are respectively arranged on the two symmetrical sides of the anodizing tank 1, and the gas stirring systems 11 on each side respectively include the gas source 3, the pipeline and the connection installed on the pipe The gas source 3 in the gas stirring system 1 on each side passes through the pipeline with the electronically controlled gas flow meter 6 respectively to the corresponding side of the bottom of the anodizing tank 1 for stirring; the temperature sensor 10 The output terminals of the PLC controller 9 are connected to ...
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The invention discloses an automatic temperature balance system for an aluminum anodic oxidation tank, which includes a PLC controller and a temperature sensor, the temperature sensor detects the temperature of the uppermost layer of the tank liquid in the anodic oxidation tank, and gas stirring is respectively arranged on two symmetrical sides of the anodic oxidation tank system, the gas mixing system on each side includes gas source and total sub-pipeline respectively, and the pipe ends of each branch pipe extend into the lower part of the corresponding side in the anodizing tank respectively, and the main pipes of the total sub-pipelines on each side are respectively connected with a pressure reducing valve. The branches are respectively connected to install electronically controlled flowmeters, the temperature sensor is connected to the signal input terminal of the PLC controller, the output terminals of each electronically controlled flowmeter are respectively connected to the signal input terminals of the PLC controller, and the signal output terminals of the PLC controller are respectively Connect with the control terminal of each electronically controlled flowmeter. The invention realizes the goal of uniform temperature distribution of the large-capacity anodic oxidation bath.
Description
technical field [0001] The invention relates to the field of a temperature control system of an electrode oxidation tank for LCD processing, in particular to an automatic temperature balancing system for an aluminum anodic oxidation tank. Background technique [0002] 10.5G is currently the largest production line in the LCD industry. Compared with 8.5 / 7 / 6G, etc., the size of the upper electrode consumables used in the plasma etching process is also the largest. The upper electrode is used in TET-LCD plasma etching equipment, most of which are aluminum products, and the surface needs to be anodized. The high-quality anodized film endows the upper electrode with good voltage resistance, impedance and corrosion resistance. [0003] The anodic oxidation treatment of aluminum surface is carried out in an anodic oxidation tank. The temperature of the anodic oxidation bath is an important process parameter of anodic oxidation. When the temperature of the bath liquid rises from 10°...
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IPC IPC(8): G05D23/19G05B19/05B01F15/00
CPCG05D23/19G05B19/054B01F35/2111B01F35/2115B01F35/2206B01F35/2215
Inventor 刘晓刚万俊许杰
Owner 合肥微睿科技股份有限公司