Modular packaging structure and method
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SHANGHAI XIANFANG SEMICON CO LTD
- Publication Date
- 2020-11-06
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
technical field
[0001] The invention relates to the technical field of semiconductor packaging, in particular to a modular packaging structure and method. Background technique
[0002] The existing preparation method of heterogeneous substrate integrated structure generally uses multi-layer heterogeneous substrate and organic metal wiring layer for line layout and signal interconnection, and then pastes multiple functional chips on one side, and realizes three-dimensional structure through space folding. 3D integration. Due to the use of multi-layer heterogeneous substrates and organic metal wiring layers in this method, the size in the Z direction will be very large after three-dimensional folding. For the small size currently required, the X and Y directions will be reduced while the Z direction will be greatly increased. The size and thickness of the above cannot effectively reduce the package volume of the structural parts and improve the integration of the microsystem....