Distributed feedback laser based on W3 photonic crystal defect waveguide and preparation method
A technology of photonic crystal waveguide and distributed feedback, which is applied in semiconductor lasers, lasers, phonon exciters, etc., can solve the problems of large size, high device cost, unfavorable chip integration, etc., and achieve increased width and increased optical gain Effect
Inactive Publication Date: 2020-11-10
华慧科锐(天津)科技有限公司
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[0004] However, there is a problem with the DFB-LD chip at present: the size is large, which is not conducive to chip integration, and at the same time, the device cost is also high due to the large size
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[0036] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
[0037] figure 1 It shows the top view of the distributed feedback laser based on W3 photonic crystal defect waveguide provided by the embodiment of the present invention; figure 2 A cross-sectional view of a distributed feedback laser based on a W3 photonic crystal defect waveguide provided by an embodiment of the present invention is shown. i...
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Abstract
The embodiment of the invention provides a distributed feedback laser based on a W3 photonic crystal defect waveguide and a preparation method. The distributed feedback laser comprises a P electrode,a P doped layer, a quantum well active layer, an N doped layer and an N electrode; the active photonic crystal waveguide layer comprises two micropore waveguide arrays which are distributed on the twosides of the P electrode, each micropore waveguide array is formed by arranging a plurality of micropores according to a preset array structure, and each micropore penetrates through the P doped layer, the quantum well active layer and the N doped layer and is cut off on the upper surface of the substrate; three columns of micropores in the two-dimensional pattern structure are removed in the direction of the defect photonic crystal waveguide to form the W3 photonic crystal defect waveguide. According to the embodiment of the invention, the ultra-short laser resonant cavity is designed by utilizing the slow light effect generated by coupling the forward wave and the reverse wave in the W3 photonic crystal defect waveguide, so that the size of the chip can be reduced, the device cost can be reduced, and the integratable performance of the chip can be improved.
Description
technical field [0001] The invention relates to the field of integrated optoelectronic devices, in particular to a distributed feedback laser based on a W3 photonic crystal defect waveguide and a preparation method. Background technique [0002] Distributed feedback laser (DFB-LD) is a laser with a Bragg grating built in a semiconductor laser and relying on the mode selection principle of the grating to obtain a specific lasing wavelength. The grating of the DFB laser is distributed in the resonant cavity of the entire laser, and the light wave can obtain gain while feeding back. DFB-LD can generally be divided into two types: gain coupling and refractive index coupling. The former is to engrave the grating structure into the active area, so that the gain of the active area changes periodically, thereby generating feedback to the optical guided mode in the laser cavity. . The latter is to engrave the grating structure above the active region, and generate feedback to the p...
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IPC IPC(8): H01S5/12H01S5/10
CPCH01S5/1042H01S5/12H01S2304/00
Inventor 黄翊东崔开宇刘仿冯雪张巍
Owner 华慧科锐(天津)科技有限公司