Distributed feedback laser with groove structure and preparation method

Abstract

Embodiments of the present invention provide a distributed feedback laser with a groove structure and a preparation method thereof. The distributed feedback laser includes a P electrode, a P doped layer, a quantum well active layer, an N doped layer, and an N electrode; the P electrode is located at the P At the center of the surface of the doped layer, a photonic crystal hole array is arranged on both sides of the P electrode. The photonic crystal hole array is formed by a plurality of photonic crystal holes arranged according to a preset arrangement structure, and each photonic crystal hole runs through the P The doped layer, the quantum well active layer and the N-doped layer are cut off on the upper surface of the substrate; the active photonic crystal waveguide layer also includes a symmetrical double-groove structure, and the symmetrical double-groove structure consists of the first groove and the second groove. The first groove and the second groove are arranged on both sides of the P electrode, run through the P doped layer, the quantum well active layer and the N doped layer, and stop on the upper surface of the substrate. The embodiment of the present invention utilizes the photonic crystal slow light effect to design an ultrashort laser resonant cavity, thereby reducing the volume of the chip and improving the integration performance of the chip.

Description

technical field [0001] The invention relates to the field of integrated optoelectronic devices, in particular to a distributed feedback laser with a groove structure and a preparation method. Background technique [0002] Distributed feedback laser (DFB-LD) is a laser with a Bragg grating built in a semiconductor laser and relying on the mode selection principle of the grating to obtain a specific lasing wavelength. The grating of the DFB laser is distributed in the resonant cavity of the entire laser, and the light wave can obtain gain while feeding back. DFB-LD can generally be divided into two types: gain coupling and refractive index coupling. The former is to engrave the grating structure into the active area, so that the gain of the active area changes periodically, thereby generating feedback to the optical guided mode in the laser cavity. . The latter is to engrave the grating structure above the active region, and generate feedback to the photoconductive mode of t...

AI Technical Summary

Problems solved by technology

[0004] However, there is a problem with the DFB-LD chip at present: the size is large, which is not conducive to chip integration, and at the same time, the device cost is also high due to the large size

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