Vacuum exhaust device and vacuum exhaust method

Abstract

The invention relates to the technical field of vacuumizing, and particularly discloses a vacuum exhaust device and a vacuum exhaust method. The vacuum exhaust device comprises a main pipeline, a drytype vortex pump, a leak detector, a molecular pump, a vacuum detector and a plurality of first valve bodies, the dry type vortex pump is communicated with the main pipeline through the molecular pump; the main pipeline is communicated with a plurality of external exhaust devices through a plurality of first valve bodies respectively; the leak detector is respectively communicated with the dry vortex pump and the molecular pump, the vacuum detector is used for measuring the vacuum degrees of the exhaust devices, and the leak detector is used for measuring whether air leakage occurs or not; thevacuum exhaust device is simple in structure and convenient to use, and exhausting and vacuumizing of the plurality of exhaust devices can be completed at a time; through the arrangement of the leakdetector, the exhaust devices with air leakage can be conveniently and quickly closed by means of the first valve bodies; by means of the vacuum detector, the accuracy and consistency of the vacuum degrees of the multiple exhaust devices are guaranteed; and the vacuumizing efficiency and the vacuumizing yield of the exhaust devices are improved.

Description

technical field [0001] The invention relates to the technical field of vacuum pumping, and in particular discloses a vacuum exhaust device and a vacuum exhaust method. Background technique [0002] Infrared radiation is everywhere around us. Using infrared thermal imaging to observe objects does not require an external light source. Compared with visible light, infrared thermal imaging has a better ability to penetrate smoke. Infrared thermal imaging is an important supplement to visible light images. The detection and utilization of infrared radiation penetrates into all aspects of modern military, industry, and life, and is widely used in many fields such as infrared guidance, infrared night vision, security monitoring, and visual enhancement. [0003] Since the human eye does not respond to infrared radiation, special infrared detectors must be used for the perception and detection of infrared radiation. Microbolometer uncooled infrared focal plane array detectors are com...

AI Technical Summary

Problems solved by technology

[0006] In the prior art, the structure of exhausting and vacuuming exhaust devices such as microbolometer uncooled infrared focal plane array detectors is complicated, the operation is time-consuming and laborious, and the process of exhausting and vacuuming is uncontrollable, which is extremely inconvenient to use , leading to low exhaust vacuum efficiency and unstable yield of exhaust devices

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