LCP-based multi-layer rectangular micro coaxial radio frequency transmission line manufacturing method and transmission line

Abstract

The invention provides an LCP-based multi-layer rectangular micro-coaxial radio frequency transmission line manufacturing method and a transmission line, and the method comprises the steps: carrying out the photoetching of a multi-layer LCP circuit board, carrying out the lamination to generate a target multi-layer LCP circuit board, enabling the upper surface of a first LCP circuit board in the target multi-layer LCP circuit board to be provided with a first metal region, and enabling the lower surface to be provided with a first metal layer; processing at least two grooves extending in the thickness direction of the target multilayer LCP circuit board, wherein the grooves extend to the first metal layer; taking the first metal layer as a cathode and the groove as a mold, and performing electroforming filling on the groove to the upper surface of the target multilayer LCP circuit board; cutting the target multilayer LCP circuit board between the two grooves and the first metal regionto form a support body and an inner cavity, wherein the support body is used for supporting the first metal region; and the other LCP circuit board is laminated after the inner cavity is sealed. The metal side wall is formed by filling electroformed copper after grooves are machined in the laminated multi-layer plate through laser, the laminating frequency is reduced, and the problem that the laminating period is long is solved.

Description

technical field [0001] The invention relates to the field of radio frequency microsystem manufacturing, in particular to an LCP-based multilayer rectangular micro-coaxial radio frequency transmission line manufacturing method and the transmission line. Background technique [0002] With the development of electronic products in the direction of thinner, lighter and multifunctional, high integration requirements are put forward for RF Microsystems (RF Microsystems). Traditional transmission lines such as coplanar waveguides, microstrip lines, and coaxial lines have been widely used in microwave systems, and have good transmission characteristics at low frequencies. However, as the frequency rises, the performance of the transmission line is greatly reduced due to problems such as the dielectric and radiation loss and the limitation of high-order modal excitation in the traditional planar transmission structure. The three-dimensional rectangular micro-coaxial transmission lin...

AI Technical Summary

Problems solved by technology

However, in the prior art, there is no method for preparing a micro-coaxial radio frequency transmission device using a multi-layer LCP circuit board

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