Manufacturing method and transmission line of multilayer rectangular micro-coaxial radio frequency transmission line based on lcp

Abstract

The invention provides a method for manufacturing a multilayer rectangular micro-coaxial radio frequency transmission line based on LCP and the transmission line, comprising: performing photolithography on a multilayer LCP circuit board and then laminating to generate a target multilayer LCP circuit board, and the target multilayer LCP circuit board The upper surface of the first-layer LCP circuit board has a first metal region, and the lower surface has a first metal layer; at least two grooves extending along the thickness direction are processed for the target multilayer LCP circuit board, and the grooves extend to the first Metal layer; the first metal layer is used as a cathode, and the groove is used as a mould, and the groove is electroformed and filled to the upper surface of the target multilayer LCP circuit board; the target multilayer LCP between the two grooves and the first metal region The circuit board is cut to form a support body and an inner cavity, and the support is used to support the first metal region; another LCP circuit board is sealed to cover the inner cavity and then laminated. In the present invention, the metal side wall is formed by laser machining grooves of the laminated multi-layer board and filled with electroformed copper, which reduces the number of laminations and solves the problem of long lamination cycle.

Description

technical field [0001] The invention relates to the field of radio frequency microsystem manufacturing, in particular to an LCP-based multilayer rectangular micro-coaxial radio frequency transmission line manufacturing method and the transmission line. Background technique [0002] With the development of electronic products in the direction of thinner, lighter and multifunctional, high integration requirements are put forward for RF Microsystems (RF Microsystems). Traditional transmission lines such as coplanar waveguides, microstrip lines, and coaxial lines have been widely used in microwave systems, and have good transmission characteristics at low frequencies. However, as the frequency rises, the performance of the transmission line is greatly reduced due to problems such as the dielectric and radiation loss and the limitation of high-order modal excitation in the traditional planar transmission structure. The three-dimensional rectangular micro-coaxial transmission lin...

AI Technical Summary

Problems solved by technology

However, in the prior art, there is no method for preparing a micro-coaxial radio frequency transmission device using a multi-layer LCP circuit board

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