Unlock instant, AI-driven research and patent intelligence for your innovation.

Technology for PVD plating of transparent insulating film on surface of metal part

A technology of transparent insulation and transparent insulation layer, applied in metal material coating process, sputtering plating, ion implantation plating, etc., can solve the problems of single color, easy corrosion of metal parts, and inability to achieve surface insulation of metal parts. , to achieve the effect of simple process flow and low cost

Pending Publication Date: 2020-11-20
昆山市恒鼎新材料有限公司
View PDF1 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Because the surface of 3C metal appearance parts requires insulation, usually only a layer of metal carbide can be plated on the surface of the metal part to achieve the purpose of insulating the surface of the metal part, but the color of the metal carbide is fixed, and it is presented by the metal part as the coating. The single color severely limits the demand for different colors as consumer electronic appearance parts; simply coating metal parts with various color layers will not meet the problems of surface insulation of metal parts and metal parts are easy to corrode

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Technology for PVD plating of transparent insulating film on surface of metal part
  • Technology for PVD plating of transparent insulating film on surface of metal part

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] A process for PVD coating a transparent insulating film on the surface of a metal piece, comprising the following steps,

[0023] Step S01. Ultrasonic cleaning the metal part 1 coated with the color layer, putting it into a vacuum furnace, and vacuuming it to 2.0*10 -3 Pa, dry at 200°C for 60 minutes;

[0024] Step S02, feed argon gas into the above-mentioned vacuum furnace, control its feed flow rate to 500 sccm, workpiece bias voltage to 500 V, duty cycle to 30%, target current to 0.2 A, and ion-clean the metal parts for 60 min;

[0025] Step S03, turn off the argon gas and workpiece bias, and evacuate the vacuum furnace to a vacuum degree of (1.0-6.0)*10 -3 Pa, subsequently, pass argon gas into the vacuum chamber with the flow rate of 500sccm, make its internal vacuum degree maintain at 10 -1 Pa order of dynamic equilibrium pressure;

[0026] Step S04, using the vacuum planar magnetron sputtering method to sequentially coat the metal parts with a Si / Al transition ...

Embodiment 2

[0030] A process for PVD coating a transparent insulating film on the surface of a metal piece, comprising the following steps,

[0031] Step S01, after cleaning the metal piece 1 coated with the color layer, put it into a vacuum furnace, and evacuate it to 2.0*10 -3 Pa, dry at 200°C for 60 minutes;

[0032] Step S02, feed argon gas into the above-mentioned vacuum furnace, control its feed flow rate to 400 sccm, workpiece bias voltage to 350 V, duty cycle to 50%, target current to 0.3 A, and ion-clean the metal parts for 120 min;

[0033] Step S03, turn off the argon gas and workpiece bias, and evacuate the vacuum furnace to a vacuum degree of (1.0-6.0)*10 -3 Pa, subsequently, pass argon gas into the vacuum chamber with the flow rate of 400sccm, make its internal vacuum degree maintain at 10 -1 Pa order of dynamic equilibrium pressure;

[0034] Step S04, using the vacuum planar magnetron sputtering method to sequentially coat the metal parts with a Si / Al transition layer 2 ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a technology for PVD plating of a transparent insulating film on the surface of a metal part. The technology includes the following steps that the metal part plated with a colorlayer is cleaned, then placed in a vacuum furnace, subjected to vacuum heating and dried; ion cleaning is performed on the metal part; argon and workpiece biasing are turned off, and the vacuum degree in the vacuum furnace is controlled so that the vacuum degree in the vacuum furnace is controlled to be dynamic balanced pressure in the magnitude order of 10<-1> Pa; and the temperature in the vacuum furnace is controlled to be 100-300 DEG C, and the metal part is sequentially plated with a Si / Al transition layer and a silicon oxide / aluminum oxide transparent insulating layer through a vacuum plane magnetron sputtering method. The technology for PVD plating of the transparent insulating film on the surface of the metal part adopts a physical vapor deposition principle, and the transparent insulating layer is plated on the outer side of the original plated metal part through the vacuum plane magnetron sputtering method, so that the surface of the metal part can meet the requirement for surface insulation, and use requirements of the metal part for different colors can also be met; and the process flow is simple, environmentally friendly and low in cost.

Description

technical field [0001] The invention relates to the technical field of coating of metal parts, in particular to a process for PVD coating a transparent insulating film on the surface of a metal part. Background technique [0002] Because the surface of 3C metal appearance parts requires insulation, usually only a layer of metal carbide can be plated on the surface of the metal part to achieve the purpose of insulating the surface of the metal part, but the color of the metal carbide is fixed, and it is presented by the metal part as the coating. The single color severely limits the demand for different colors as consumer electronic appearance parts; simply coating metal parts with various color layers cannot meet the problems of surface insulation of metal parts and metal parts are easy to corrode. Contents of the invention [0003] In order to solve the above-mentioned problems in the prior art, the present invention provides a PVD transparent insulating film coating proc...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/16C23C14/10C23C14/08C23C14/35
CPCC23C14/165C23C14/10C23C14/081C23C14/35C23C14/0036
Inventor 不公告发明人
Owner 昆山市恒鼎新材料有限公司