LDI exposure lens focal plane adjusting method
An adjustment method and lens technology, applied in the field of LDI, can solve the problems of focal plane dispersion, consumption of dry film and pcb board resources, and low efficiency, and achieve the effects of improving discrimination and accuracy, improving debugging efficiency, and saving resources
Inactive Publication Date: 2020-11-20
合肥众群光电科技有限公司
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Problems solved by technology
This method of adjusting the focal plane has the following defects: 1. The efficiency is very low; 2. It consumes a lot of dry film and pcb board resources; 3. The searched focal planes are all discrete, and accurate values cannot be obtained; the naked eye judgment is susceptible to objective factors Impact
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[0029] like figure 1 Shown, a kind of LDI exposure lens focal plane adjusting method, comprises the following steps:
[0030] S1. Return the Z axis to zero, and move the bottom camera to the bottom of the exposure lens, and the exposure lens projects a grid image to the bottom camera;
[0031] S2. The bottom camera steps on the Z axis according to the first set step size, searches in the whole stroke, and obtains the maximum inter-class variance of images corresponding to different heights through the grayscale image definition method, and compares all the maximum inter-class variances. Difference, the maximum inter-class variance with the highest value corresponds to the position of the image and the surrounding setting area as the first setting range, and the best focal plane is located within the first setting range;
[0032] The method for judging the clarity of the grayscale image is as follows:
[0033] S21. Divide the image I whose size is M*N into two parts, the back...
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An LDI exposure lens focal plane adjusting method comprises: S1, a Z axis returning to zero, moving a bottom camera to the position below an exposure lens, and the exposure lens projecting a grid mapto the bottom camera; S2, a bottom camera stepping on the Z axis according to a first set step length, searching in the whole journey, obtaining maximum between-cluster variances of the images corresponding to different heights through a gray level image definition judgment method, comparing all the maximum between-cluster variance values, the position of the image corresponding to the maximum between-cluster variance with the highest numerical value and a surrounding set area to serve as a first set range, and enabling the optimal focal plane to be located in the first set range; S3, using asecond set step length smaller than the first set step length for stepping in the first set range obtained in the step S2, and obtaining a second set range smaller than the first set range according to a gray level image definition judgment method; and S4, in a set range, finding an optimal focal plane by all the maximum between-cluster variances. The grayscale image definition judgment method provided by the invention improves the discrimination and precision of the algorithm.
Description
technical field [0001] The invention relates to the technical field of LDI, in particular to a method for adjusting the focal plane of an LDI exposure lens. Background technique [0002] At present, the method used by the multi-head direct writing exposure machine (LDI) to adjust the focal planes of multiple lenses to be consistent is to expose high-precision graphics data on different focal planes through each lens, and then search for the best with the naked eye after development and etching. The adjustment of the focal plane is completed step by step. This method of adjusting the focal plane has the following defects: 1. The efficiency is very low; 2. It consumes a lot of dry film and pcb board resources; 3. The searched focal planes are all discrete, and accurate values cannot be obtained; the naked eye judgment is susceptible to objective factors Impact. Contents of the invention [0003] In order to avoid repeated exposure of the pcb board to manually search the ...
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IPC IPC(8): G02B7/36G03F7/20
CPCG02B7/36G03F7/20
Inventor 陈修涛
Owner 合肥众群光电科技有限公司