The invention discloses a filing device of a three-dimensional
package vertical through hole. The filling device comprises a
metal liquid spraying device and a filling working region and is characterized in that a
crucible is of an internally-externally nested circular
ring type structure, a cavity between an internal accommodating cavity and an external accommodating cavity is filled with a filling material, a press sheet is driven by a transmission rod connected with piezoelectric
ceramic to squeeze a
metal liquid in a central hole to be sprayed from a spraying hole, the
crucible is connected with the upper part of the cavity by a
crucible support connected with a three-dimensional
motion controller, so that the crucible moves freely and is matched with a substrate of the filling working region to complete filling. The invention also discloses a method applying the above device for filling the three-dimensional
package vertical through hole. With coordination of the
metal liquid spraying device and a working platform of the filling working region, uniform liquid drops can be formed, the frequency is controllable, a steady-flow
liquid line also can be formed, and metallic filing of the three-dimensional
package vertical through hole is achieved. The filling device has the advantages of high size accuracy, low
porosity, high filling efficiency, low cost and simplicity in process, and can be automatically produced.