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Molecular pump unit and vacuum system leak detection method

A technology of vacuum system and molecular pump, which is applied in the direction of liquid tightness measurement, pump, and pump control by using liquid/vacuum degree, which can solve the problems of complicated leak detection process and achieve the effect of simple and fast self-test and inspection

Pending Publication Date: 2020-11-27
北京中科九微科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Therefore, the technical problem to be solved by the present invention is to overcome the relatively complicated defects in the leak detection process of the vacuum system in the prior art, thereby providing a molecular pump unit and a vacuum leak detection method

Method used

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  • Molecular pump unit and vacuum system leak detection method
  • Molecular pump unit and vacuum system leak detection method
  • Molecular pump unit and vacuum system leak detection method

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Embodiment 1

[0023] The embodiment of the present invention provides a molecular pump unit, such as figure 1 and figure 2 As shown, it includes a backing pump 1 and a molecular pump 2, and also includes: a backing vacuum gauge 3, a high vacuum gauge 4, and a unit controller 5. Specifically, the backing pump may be an oil-sealed mechanical vacuum pump.

[0024] The backing vacuum gauge 3 is arranged on the vacuum pipeline 6 for measuring the backing pressure after the backing pump 1 is turned on.

[0025] In the embodiment of the present invention, the vacuum pipeline 6 is connected to the backing pump 1 and the backing vacuum gauge 3 respectively. The internal pressure can obtain the fore-stage pressure after the fore-stage pump 1 is turned on, so that the air leakage condition of the vacuum system where the molecular pump unit is located can be indirectly reflected through the fore-stage pressure.

[0026] In a specific embodiment, if the foreline pump 1 is turned on, the pressure of o...

Embodiment 2

[0039] The embodiment of the present invention provides a vacuum system leak detection method, which is suitable for the molecular pump unit provided in the above embodiment 1, such as image 3 As shown, the leak detection method mainly includes:

[0040] Step S10: Obtain the backing pressure of the molecular pump unit. In practical applications, the backing pump 1 can be turned on first, and the backing vacuum gauge 3 is used to measure the pressure of the vacuum pipeline 6 to obtain the backing pressure.

[0041] Step S20: judging whether the value of the pre-stage pressure within the first preset time period is less than or equal to the first threshold. In a specific embodiment, the first threshold can be adjusted according to the actual working conditions. In the embodiment of the present invention, the value of the first threshold can be set to 10Pa, and the ideal time for the pressure in the vacuum line 6 to reach 10Pa is the same as The parameters of the backing pump ...

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Abstract

The invention provides a molecular pump unit and a vacuum leak detection method. The molecular pump unit comprises a preceding-stage pump, a molecular pump, a preceding-stage vacuum gauge, a high vacuum gauge, and a unit controller, wherein the preceding-stage vacuum gauge is arranged on a vacuum pipeline and used for measuring the preceding-stage pressure when the preceding-stage pump is started;the high vacuum gauge is arranged on the vacuum chamber and used for measuring the pressure of the vacuum chamber when the molecular pump is started; and the unit controller is used for detecting whether a vacuum system where the molecular pump unit is located has an air leakage fault or not according to the preceding-stage pressure intensity and the pressure intensity of the vacuum chamber. Through the implementation of the molecular pump unit and the vacuum leak detection method, self-detection of the air leakage fault can be realized without using an additional instrument, so that the inspection of the air leakage fault of the molecular pump unit is simpler and quicker.

Description

technical field [0001] The invention relates to the technical field of vacuum leak detection, in particular to a molecular pump unit and a vacuum leak detection method. Background technique [0002] With the development of science and technology, vacuum technology is used more and more in scientific research and industry. Molecular pump is one of the main equipment for obtaining high vacuum and ultra-high vacuum conditions in modern times. Molecular pump unit integrates molecular pump, Backing pumps, vacuum pipelines, vacuum measurement and other related equipment can provide customers with a convenient integrated vacuum system for high vacuum environments. However, the first condition to provide customers with a high vacuum environment is that the molecular pump unit does not have air leakage. Therefore, it is necessary to perform leak detection on the molecular pump unit. However, when using the existing method to detect the molecular pump unit, special equipment is requir...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M3/26F04D19/04F04D27/00
CPCG01M3/26F04D19/042F04D27/001
Inventor 苏长明任世瑜邓高飞孙灵豪齐英陈林
Owner 北京中科九微科技有限公司
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