An ultra-narrowband infrared thermal radiation light source and a compact infrared gas sensor
A thermal radiation light source, gas sensor technology, applied in instruments, electrothermal devices, scientific instruments, etc., can solve the problems of low cost, large volume, low power consumption, etc., achieve low processing cost, narrow radiation spectral bandwidth, reduce cost and volume effect
Active Publication Date: 2021-08-31
CHONGQING UNIV
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Problems solved by technology
[0007] The present invention intends to provide an ultra-narrow-band infrared heat radiation light source and a compact infrared gas sensor, which can solve the problem of large volume of traditional infrared gas sensors, and has the advantages of small size, low power consumption, low cost, and simultaneous detection of multiple gases Etc
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[0039] Such as figure 1 and figure 2 As shown, this embodiment discloses an ultra-narrow-band infrared thermal radiation light source, which includes from bottom to top: a first substrate 1 , a support layer 2 , a heating plate 4 , a metamaterial absorber and a sealing layer 9 .
[0040] The first substrate 1 is a CMOS substrate, the supporting layer 2 is deposited on the first substrate 1, and forms a cavity structure, between the heating plate 4 and the supporting layer 2 and between the heating plate 4 and the metamaterial absorber Both are equipped with a first insulating layer 3, an insulating layer is deposited on the support layer 2, and an insulating layer is deposited on the heating plate 4. The setting of the first insulating layer 3 can avoid direct contact between various parts.
[0041] In this embodiment, the heating plate 4 is a MEMS heating plate 4, the metamaterial absorber includes a metal plate 6 and a microarray structure, the metal plate 6 is connected t...
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Abstract
The invention relates to the technical field of gas sensors, in particular to an ultra-narrowband infrared heat radiation light source and a compact infrared gas sensor. The infrared heat radiation light source includes a first substrate, a support layer, a heating plate, a metamaterial absorber and a sealing layer. The material absorber includes a metal plate and a microarray structure, the microarray structure is arranged above the metal plate, and the microarray structure includes a dielectric layer and a metal antenna. Both sides of the heating plate are provided with a first insulating layer. The compact infrared gas sensor includes a gas chamber, an infrared emitter and an infrared detector. The infrared emitter uses the above-mentioned ultra-narrow-band infrared thermal radiation light source, and the inner wall of the gas chamber is provided with a reflective layer. , thermosensitive layer and metasurface. The low-radiation compact infrared gas sensor of the present application can solve the problems of large size and high cost of traditional infrared gas sensors, and has the advantages of small size, low power consumption, low cost, and simultaneous detection of multiple gases.
Description
technical field [0001] The invention relates to the technical field of gas sensors, in particular to an ultra-narrowband infrared thermal radiation light source and a compact infrared gas sensor. Background technique [0002] A gas sensor is a converter that converts a certain gas volume fraction into a corresponding electrical signal. [0003] The application of gas sensors in the civil field is mainly reflected in: in the kitchen, detecting the leakage of civil gas such as natural gas, liquefied petroleum gas and city gas, and automatically controlling the cooking of food in the microwave oven by detecting the gas generated when food is cooked in the microwave oven; houses, buildings, etc. , Conference rooms and public entertainment places use carbon dioxide sensors, smoke sensors, ozone sensors, etc. to control the automatic operation of air purifiers or electric fans; in some high-rise buildings, gas sensors can also be used to detect fire signs and alarm. [0004] In t...
Claims
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IPC IPC(8): G01N21/3504G01N21/31G01N21/01G01N21/25H05B3/00
CPCG01N21/01G01N21/255G01N21/31G01N21/3504G01N2021/0112G01N2021/3129H05B3/0019H05B3/0033
Inventor 牟笑静李东晓周鸿惠新丹
Owner CHONGQING UNIV