Device and method for accurately measuring thickness of weak-rigidity thin part
A weakly rigid and thin-shaped technology, applied in the direction of measuring devices, instruments, etc., can solve the problems of small measurement range, difficult to realize online scanning by ray method, cumbersome dielectric measurement, etc., and achieve the effect of high detection accuracy
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Embodiment 1
[0039] A device for accurately measuring the thickness of weakly rigid thin parts, such as Figure 1-7 As shown, the base plate 1 is included, the base plate 1 is provided with a circular platform 2, and the circular platform 2 is provided with a vacuum rotary table 3 which rotates with the circular platform 2. The table top of the vacuum rotary table 3 is circular and vacuum The bottom center of the rotary table 3 is provided with a support column 4, the top of the support column 4 is fixedly connected with the vacuum rotary table 3, the bottom of the support column 4 is connected with the base plate 1 in rotation, and the base plate 1 is provided with a servo motor for driving the support column 4 to rotate (not shown in the figure).
[0040] The upper surface of the vacuum rotary table 3 is provided with a plurality of coaxial annular grooves 5 , and the inner depths of the plurality of coaxial annular grooves 5 are consistent. The side of the vacuum rotary table 3 is prov...
Embodiment 2
[0046] A method for measuring the thickness of weakly rigid thin-shaped parts using the device for accurately measuring the thickness of weakly rigid thin-shaped parts in Embodiment 1, such as Figure 8 and Figure 9 As shown, taking the weakly rigid thin-shaped part to be tested as a copper sheet as an example, the method for thickness detection and calculation of the weakly rigid thin-shaped part of the present invention, the specific steps are as follows:
[0047] (1) Place the weakly rigid thin part 12 to be tested on the vacuum rotary table 3, vacuum the vacuum rotary table 3, and perform vacuum adsorption on the weakly rigid thin part 12.
[0048] (2) Initialize the position of the measuring probe 10 on the transverse guide rail 9 , that is, the initial position of the measuring probe 10 on the transverse guide rail 9 is that the measuring probe 10 points vertically to the center of the upper surface of the vacuum rotary table 3 . Move the transverse guide rail 9 down u...
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