Probe station focusing method and device, computer equipment and storage medium
A focusing method and probe station technology, which can be used in measuring devices, TVs, color TVs, etc., to solve problems such as poor focusing accuracy and achieve the effect of automatic and precise focusing.
Active Publication Date: 2021-01-12
HANGZHOU CHANGCHUAN TECH CO LTD
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Problems solved by technology
[0004] Embodiments of the present application provide a probe station focusing method, device, computer equipment, and computer-readable storage medium to at least solve the problem of poor focusing accuracy in the related art
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[0029] In order to make the purpose, technical solutions and advantages of the present application clearer, the present application will be described and illustrated below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present application, and are not intended to limit the present application. Based on the embodiments provided in the present application, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.
[0030] Obviously, the accompanying drawings in the following description are only some examples or embodiments of the present application, and those skilled in the art can also apply the present application to other similar scenarios. In addition, it can also be understood that although such development efforts may be complex and lengthy, for those of ...
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The invention relates to a probe station focusing method and device, computer equipment and a storage medium, and the method comprises the steps: controlling a slide holder to drive a wafer to carry out the first movement in a preset direction at a first step pitch, and obtaining the wafer images of a starting position and an ending position of the first movement; determining an initial position of a second motion according to the wafer image of the initial position and the wafer image of the termination position; controlling a slide holder to drive the wafer to perform a second motion along apreset direction according to the initial position; acquiring a wafer image and recording position information after each second step pitch is moved, wherein the second step pitch is smaller than thefirst step pitch; obtaining the definition of the corresponding wafer image according to the plurality of wafer images, and fitting a definition curve according to the position information and the wafer image definition corresponding to the corresponding position information; and according to the definition curve, determining the focusing position, solving the problem of poor focusing precision,and realizing automatic and accurate focusing of the probe station.
Description
technical field [0001] The present application relates to the field of integrated circuit testing equipment, in particular to a probe station focusing method, device, computer equipment and storage medium. Background technique [0002] Integrated circuits are the key support for the rapid development of the electronic information industry. Wafer testing is an important process in the manufacture of integrated circuits. Accurate testing can eliminate defective products in time, reduce the waste of packaging and testing costs, and improve product yield. The probe station is a device used for wafer testing, which can automatically complete the electrical performance test of integrated circuits after being connected to the testing machine. The main function of the probe station is to complete the X-direction, Y-direction and Z-direction positioning of the wafer pad and the probe tip, and realize the precise alignment of the two, that is, the needle alignment process. Among them...
Claims
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Login to View More IPC IPC(8): G01R31/28H04N5/232
CPCG01R31/2891H04N23/67H04N23/64
Inventor 赵轶郭剑飞张雪英黄长兴姚建强陈思乡
Owner HANGZHOU CHANGCHUAN TECH CO LTD