Thin film actuated mirror array in optical projection system and method for manufacturing same

Abstract

An AMA film in an optical projection system and a manufacturing method thereof. The AMA film has a substrate including electrical leads and connection terminals, a support member formed on the substrate, an actuator formed on the support member, and a reflector formed on the actuator. The exciter has a maximum length (L) constituting a large inclination angle (θ) so that a reflecting member provided on the actuator has a large inclination angle (θ). Therefore, the light reflecting efficiency of the reflector is improved, the contrast of the projected picture on the screen is increased, and the picture quality is improved. In addition, since the exciter has a large tilt angle (θ), the distance between the light source and the screen is wide.

Description

technical field [0001] The invention relates to a thin-film excitation mirror array in an optical projection system and a manufacturing method thereof, in particular to a thin-film excitation mirror array in an optical projection system with an actuator and a manufacturing method thereof, and the length of the actuator is relatively long In order to excite with a large excitation angle, thereby improving the quality of the projected picture on the screen. Background technique [0002] Generally, light modulators are classified into two types based on their optical structures. One is a direct light modulator, such as a cathode ray tube (CRT), and the other is a transmitted light modulator, such as a liquid crystal display (LCD). CRTs can produce high-quality pictures on a screen, but the manufacture of the screen makes the CRT heavy, bulky, and expensive. The optical structure of the LCD is simple, so the weight and volume of the LCD are smaller than those of the CRT. Howe...

AI Technical Summary

Problems solved by technology

However, LCDs are less than 1-2% light efficient due to light polarization

[0015] However, in the thin-film AMA described above, the inclination angle of the actuator provided in the thin-film AMA is small due to the short length of the actuator.

Therefore, the light efficiency of the light reflected by the reflector installed on the actuator decreases, and the contrast of the picture projected on the screen also decreases.

As a result, the quality of the picture projected onto the screen deteriorates

In addition, the distance between the light source and the screen is narrow due to the limited tilt angle of the exciter

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