Leveling device in semiconductor heat treatment equipment and semiconductor heat treatment equipment
A technology of heat treatment equipment and leveling device, which is applied in lighting and heating equipment, semiconductor/solid-state device manufacturing, furnaces, etc., and can solve failure, small diameter of connecting bolts, and unsynchronized screwing of multiple connecting bolts. and other problems to achieve the effect of reducing the probability of failure, improving the sealing stability and improving the stability of use
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[0036]In order for those skilled in the art to better understand the technical solution of the present invention, the leveling device and the semiconductor heat treatment equipment provided by the present invention will be described in detail below with reference to the accompanying drawings.
[0037] Such as figure 1 As shown, this embodiment provides a leveling device 1 in semiconductor heat treatment equipment, which is used to level the process door assembly in semiconductor heat treatment equipment. 1 includes an elastic member 11, a first connecting piece 12 and a second connecting piece 13, wherein the first connecting piece 12 is provided with a first receiving groove 121, and the first connecting piece 12 is connected to one of the sealing door 18 and the supporting part 19 Connection; the second connecting member 13 is provided with a second receiving groove 131, and the second receiving groove 131 is arranged opposite to the first receiving groove 121, and the secon...
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