Low-warpage polycrystalline silicon wafer
A polycrystalline silicon wafer, low warpage technology, applied in polycrystalline material growth, crystal growth, single crystal growth, etc., can solve the problem of high warpage
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Embodiment 1
[0021] A low-warp polycrystalline silicon wafer, comprising the following components prepared by weight: 120-140 parts of high-purity quartz, 100-115 parts of coke, 70-90 parts of sulfuric acid; 50-65 parts of hydrogen chloride, 40-55 parts of hydrogen Parts, including specific preparation steps are as follows:
[0022] S1, select materials: select 120 parts of high-purity quartz, 100 parts of coke, 70 parts of sulfuric acid; 50 parts of hydrogen chloride, 40 parts of hydrogen;
[0023] S2. High-temperature reduction: Put the selected high-purity quartz and corresponding coke raw materials into the silicon submerged arc furnace, and through high-temperature heating, the high-purity quartz and coke undergo a reduction reaction to generate industrial silicon;
[0024] S3. Pickling: put the industrial silicon produced by reduction in the silicon submerged arc furnace into the reactor A, which is filled with sulfuric acid solution, and slowly mix and stir the raw materials in the ...
Embodiment 2
[0034] A low-warp polycrystalline silicon wafer, comprising the following components prepared by weight: 120-140 parts of high-purity quartz, 100-115 parts of coke, 70-90 parts of sulfuric acid; 50-65 parts of hydrogen chloride, 40-55 parts of hydrogen Parts, including specific preparation steps are as follows:
[0035] S1, select materials: select 130 parts of high-purity quartz, 110 parts of coke, 80 parts of sulfuric acid; 55 parts of hydrogen chloride, 50 parts of hydrogen;
[0036] S2. High-temperature reduction: Put the selected high-purity quartz and corresponding coke raw materials into the silicon submerged arc furnace, and through high-temperature heating, the high-purity quartz and coke undergo a reduction reaction to generate industrial silicon;
[0037] S3. Pickling: put the industrial silicon produced by reduction in the silicon submerged arc furnace into the reactor A, which is filled with sulfuric acid solution, and slowly mix and stir the raw materials in the ...
Embodiment 3
[0047] A low-warp polycrystalline silicon wafer, comprising the following components prepared by weight: 120-140 parts of high-purity quartz, 100-115 parts of coke, 70-90 parts of sulfuric acid; 50-65 parts of hydrogen chloride, 40-55 parts of hydrogen Parts, including specific preparation steps are as follows:
[0048] S1, select materials: select 140 parts of high-purity quartz, 115 parts of coke, 90 parts of sulfuric acid; 65 parts of hydrogen chloride, 55 parts of hydrogen;
[0049] S2. High-temperature reduction: Put the selected high-purity quartz and corresponding coke raw materials into the silicon submerged arc furnace, and through high-temperature heating, the high-purity quartz and coke undergo a reduction reaction to generate industrial silicon;
[0050] S3. Pickling: put the industrial silicon produced by reduction in the silicon submerged arc furnace into the reactor A, which is filled with sulfuric acid solution, and slowly mix and stir the raw materials in the re...
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