Vacuum vapor phase cleaning jig and method for thick-film deep-cavity hybrid integrated circuit
A hybrid integrated circuit and cleaning jig technology, which is applied in the manufacturing of circuits, electrical components, semiconductor/solid-state devices, etc., can solve the problem of inconvenient access to fixtures, and achieve the effect of easy cleaning operation, convenient fixing, and solving inconvenience in picking and placing.
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[0051] The invention discloses a vacuum vapor phase cleaning method for a thick-film deep-cavity hybrid integrated circuit, which specifically comprises the following steps:
[0052] Step 1. According to the above description of the cleaning jig, make and install the cleaning jig, and install the support bar 9 with the same structure and position as the upper end at the front, rear, and lower ends of the cleaning jig;
[0053] The welded thick-film deep-cavity hybrid integrated circuit is sequentially clamped on the four rectangular surfaces of the upper, lower, front and rear of the cleaning fixture by using the fastening block 8;
[0054] Step 2. Place the cleaning jig that has clamped the thick-film deep-cavity hybrid integrated circuit in the cleaning chamber of the vacuum vapor phase cleaner to ensure that the cleaning jig is completely fixed so that the thick-film deep-cavity hybrid integrated circuit is The cleaning chamber rotates;
[0055] Step 3. Start the cleaning ...
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