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Vacuum vapor phase cleaning jig and method for thick-film deep-cavity hybrid integrated circuit

A hybrid integrated circuit and cleaning jig technology, which is applied in the manufacturing of circuits, electrical components, semiconductor/solid-state devices, etc., can solve the problem of inconvenient access to fixtures, and achieve the effect of easy cleaning operation, convenient fixing, and solving inconvenience in picking and placing.

Active Publication Date: 2021-02-12
XIAN MICROELECTRONICS TECH INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Aiming at the problems existing in the prior art, the present invention provides a vacuum vapor phase cleaning jig and method for a thick-film deep-cavity hybrid integrated circuit, which solves the problem of inconvenient picking and placing of the existing fixture, and enables the thick-film deep-cavity hybrid integrated circuit to achieve good cleaning effect

Method used

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  • Vacuum vapor phase cleaning jig and method for thick-film deep-cavity hybrid integrated circuit
  • Vacuum vapor phase cleaning jig and method for thick-film deep-cavity hybrid integrated circuit
  • Vacuum vapor phase cleaning jig and method for thick-film deep-cavity hybrid integrated circuit

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Embodiment

[0051] The invention discloses a vacuum vapor phase cleaning method for a thick-film deep-cavity hybrid integrated circuit, which specifically comprises the following steps:

[0052] Step 1. According to the above description of the cleaning jig, make and install the cleaning jig, and install the support bar 9 with the same structure and position as the upper end at the front, rear, and lower ends of the cleaning jig;

[0053] The welded thick-film deep-cavity hybrid integrated circuit is sequentially clamped on the four rectangular surfaces of the upper, lower, front and rear of the cleaning fixture by using the fastening block 8;

[0054] Step 2. Place the cleaning jig that has clamped the thick-film deep-cavity hybrid integrated circuit in the cleaning chamber of the vacuum vapor phase cleaner to ensure that the cleaning jig is completely fixed so that the thick-film deep-cavity hybrid integrated circuit is The cleaning chamber rotates;

[0055] Step 3. Start the cleaning ...

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Abstract

The invention discloses a vacuum vapor phase cleaning jig and method for a thick-film deep-cavity hybrid integrated circuit. The main body structure of the jig is a cuboid, two side frames of the cleaning jig are fixedly connected through a plurality of parallel cross beams, and the cross beams are distributed at the upper end and the lower end of the cleaning jig; the upper surfaces of the crossbeams above the jig are flush, a supporting strip is arranged between the two cross beams, the two ends of the supporting strip are fixedly connected to the two side frames of the cleaning jig in a lap joint mode, the upper surface of the supporting strip is flush with the upper surfaces of the cross beams, and through holes are formed in the supporting strip. During cleaning, a circuit is fixed to the supporting strip firstly and then fixed into the cleaning cavity, modified alcohol is added into a vacuum vapor phase cleaning machine for first-time steam rinsing, immersion cleaning, spray cleaning, second-time steam rinsing and vacuum drying, a cleaning agent is completely immersed into all parts of the thick-film deep-cavity hybrid integrated circuit, and a good cleaning effect is achieved.

Description

technical field [0001] The invention belongs to the technical field of non-destructive cleaning of electronic components, in particular to a vacuum vapor phase cleaning fixture and method for a thick-film deep-cavity hybrid integrated circuit. Background technique [0002] With the continuous improvement of miniaturization, light weight and high reliability requirements of my country's aerospace products, thick-film deep-cavity hybrid integrated circuits are gradually replacing traditional electronic products based on printed boards. Thick-film deep-cavity hybrid integrated circuits should adopt MCM technology with bare chip packaging as the core. MCM technology uses high-density interconnection technology to connect bare chips, shorten the wire bonding strength, and realize the light weight of aerospace electronic products. Quantification and miniaturization requirements. [0003] Various pollutants remain on the circuit during assembly of the thick-film deep-cavity hybrid...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67H01L21/02
CPCH01L21/67051H01L21/67057H01L21/67034H01L21/02082
Inventor 张健赵国良刘发
Owner XIAN MICROELECTRONICS TECH INST
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