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A kind of gold foil electrode cleaning agent and preparation method thereof

A cleaning agent and electrode technology, applied in the field of cleaning agents, can solve the problems of long cleaning time, frequent electrode cleaning, and failure to keep up with continuous production, etc., and achieve the effect of short cleaning time, good removal power, and simple cleaning equipment

Active Publication Date: 2022-03-18
SUZHOU JIMCEL ELECTRONICS NEW MATERIAL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this electrode cleaning agent only removes the dirt attached to the electrode surface. In addition, due to the rapid electrophoretic deposition during the electrophoretic glass passivation process, the cleaning of the electrode needs to be very frequent. If the cleaning takes a long time, it cannot keep up with the continuous Production

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] 1) According to the proportion, mix 5% glycolic acid, 5% citric acid and 1.5% formic acid and stir evenly;

[0028] 2) Slowly add 10% scale inhibitor to the above mixed solution and stir evenly;

[0029] 3) Slowly add 1% of the corrosion inhibitor into the above mixed solution and stir evenly. The scale inhibitor is HEDP and EDTMPA mixed according to the mass ratio of 1:1.2, and the corrosion inhibitor is BTA and TTA mixed according to the mass ratio of 2:1;

[0030] 4) Add water, adjust the pH to 6, and obtain a new gold foil electrode cleaning agent.

Embodiment 2

[0032] 1) According to the proportion, mix 10% glycolic acid, 1% citric acid and 2% formic acid and stir evenly;

[0033] 2) Slowly add 6% scale inhibitor into the above mixed solution and stir evenly;

[0034] 3) Slowly add 0.8% of the corrosion inhibitor into the above mixed solution and stir evenly. The scale inhibitor is HEDP and EDTMPA mixed according to the mass ratio of 1:1.2, and the corrosion inhibitor is BTA and TTA mixed according to the mass ratio of 2:1;

[0035] 4) Add water and adjust the pH to 6.5 to obtain a new gold foil electrode cleaning agent.

Embodiment 3

[0037] 1) According to the ratio, mix 8% glycolic acid, 3% citric acid and 1% formic acid and stir evenly;

[0038] 2) Slowly add 1% scale inhibitor into the above mixed solution and stir evenly;

[0039] 3) Slowly add 0.5% of the corrosion inhibitor into the above mixed solution and stir evenly. The scale inhibitor is HEDP and EDTMPA mixed according to the mass ratio of 1:1.2, and the corrosion inhibitor is BTA and TTA mixed according to the mass ratio of 2:1;

[0040] 4) Add water, adjust the pH to 7, and obtain a new gold foil electrode cleaning agent.

[0041] The above-mentioned embodiment and the electrode with the same degree of contamination of the glass frit deposits by using the scale inhibitor alone and the corrosion inhibitor alone were compared at room temperature. The method used is the electrode dipping method, put the electrodes with the same degree of pollution by glass powder deposits into the solutions of Examples 1-3, and the scale and corrosion inhibitors...

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PUM

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Abstract

The invention discloses a novel gold foil electrode cleaning agent and a preparation method thereof, belonging to the technical field of cleaning agents. The gold foil electrode cleaning agent, by mass percentage, comprises: glycolic acid 5-10%, citric acid 1-5%, formic acid 1-2%, scale inhibitor 1-10%, corrosion inhibitor 0.5-1% , the water balance. The composition of the cleaning agent of the invention is selected and adjusted in a targeted manner, which has a strong dispersion and suspension effect on the glass powder deposited on the surface of the gold foil electrode, the cleaning equipment is simple, the cleaning time is short, and can well meet the current electrophoretic glass passivation. Production Process. In addition, through the research of many different surfactants and cleaning aids, it is found that the compound of several surfactants in a certain proportion has excellent penetration and dispersion to the deposits on the electrode surface.

Description

technical field [0001] The invention belongs to the technical field of cleaning agents, and in particular relates to a novel gold foil electrode cleaning agent and a preparation method thereof. Background technique [0002] Surface passivation technology is an important process link in the manufacturing process of semiconductor devices, which has an important impact on the electrical characteristics and reliability of devices. In traditional semiconductor separation device products, the main semiconductor product surface passivation technology uses silicon dioxide, silicon nitride, polyimide glue, white glue, glass, etc. Because glass has the advantages of low cost and high reliability as a passivation layer, it has gradually replaced white glue, polyimide glue, etc., making glass the mainstream material for the passivation layer on the surface of semiconductor products. With the development of semiconductor technology, the requirements for semiconductor surface passivation...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C11D7/26C11D7/32C11D7/36C11D7/60
CPCC11D7/265C11D7/36C11D7/3281
Inventor 刘鸣孙宇亮刘利娟陆朝霞
Owner SUZHOU JIMCEL ELECTRONICS NEW MATERIAL