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424results about How to "Short cleaning time" patented technology

Substrate cleaning method and developing apparatus

A cleaning method highly effectively cleans a surface of a semiconductor wafer by removing a dissolution product, produced when a surface of a semiconductor wafer is processed by a developing process that develops an exposed film formed on the semiconductor wafer by wetting the exposed film with a developer, from the surface of the semiconductor wafer. A cleaning liquid is poured through a cleaning liquid pouring nozzle onto a central part of a rotating wafer processed by a developing process to spread the cleaning liquid in a film over the surface of the wafer. Then, the cleaning liquid pouring nozzle is shifted to create a dry area in a central part of the wafer and the wafer is rotated at 1500 rpm to expand the dry area. The cleaning liquid pouring nozzle is moved at a nozzle moving speed high enough to keep the cleaning liquid pouring position ahead of the margin of the dry area and pouring the cleaning liquid is stopped upon the arrival of the cleaning liquid pouring nozzle at a predetermined position at 80 mm from the center of the wafer or at 5 mm above toward the center of the wafer from the peripheral edge of the wafer. The cleaning liquid may be poured through another cleaning liquid pouring nozzle disposed beforehand at the predetermined position and pouring the cleaning liquid through the cleaning liquid pouring nozzle may be stopped immediately before the margin of the dry area reaches a part onto which the cleaning liquid is poured through the cleaning liquid pouring nozzle. Preferably, a gas is blown instantaneously against the central part of the wafer to form a core fore the dry area.
Owner:TOKYO ELECTRON LTD

Intelligent cleaning robot and path planning method thereof

ActiveCN109144067AAchieve maximum coverageAchieving cleanlinessPosition/course control in two dimensionsVehiclesReal time analysisRemote control
The invention discloses an intelligent cleaning robot and a path planning method thereof. A sensor module is used for analyzing and feeding back real-time cleaning environment information; an accuratepositioning module is used for acquiring the position of the current intelligent cleaning robot on the environment map which is established through a geometric-topological hybrid map technology, andthe environment map and the real-time position are combined, the optimal sweeping path is planned by using an advanced path planning algorithm, and the data is uploaded to a cloud platform for realizing the real-time analysis, recording, and control; a driving module is used for driving the intelligent cleaning robot to run according to the planned optimal path and carrying out cleaning operation;a man-machine interaction module can be used for displaying the working state and performance of the intelligent cleaning robot by combining the temperature and humidity sensor with the camera, and the remote control and reservation functions of the intelligent cleaning robot can be completed through wifi/Bluetooth technology. According to the invention, the labor intensity is reduced, the laborefficiency is improved, and the robot is suitable for hotels, libraries, office places and public families.
Owner:CHECC DATA CO LTD +1

Cleaning machine with brine electrolysis device and cleaning method thereof

The invention discloses a cleaning machine with a brine electrolysis device and a cleaning method thereof. The cleaning machine comprises a container. A water inlet is formed in the circumferential face of the container, a rotary gushing arm is arranged above the bottom face of the container, and the outer side of the water inlet is provided with a movable water inlet pipe which can be inserted in or stretch out of the water inlet and is communicated with the rotary gushing arm. The cleaning machine further comprises the brine electrolysis device. The water inlet pipe of the outside enters a first three-way electromagnetic valve, the other two ends of the first three-way electromagnetic valve are connected with a water channel and a circulating water pump of the brine electrolysis device respectively, and a water outlet of the circulating water pump is connected to a second three-way electromagnetic valve. A water outlet pipe of an acidic water tank and a water outlet pipe of an alkaline water tank are both communicated with the circulating water pump. The second end of the second three-way electromagnetic valve is connected to a movable water inlet pipe. According to the cleaning machine with the brine electrolysis device and the cleaning method thereof, electrolyzed alkaline water and acidic water are used for conducting circulation cleaning and sterilizing, and thus pollution of waste water to the environment is reduced; moreover, the design process is reasonable and compact, cleaning time is short, the quantity of electricity is greatly saved, and the efficiency of labor is improved.
Owner:NINGBO FOTILE KITCHEN WARE CO LTD

Reverse circulation aerodynamic cavitation method for coalbed methane well and equipment

The invention discloses a reverse circulation aerodynamic cavitation method for a coalbed methane well and equipment. The reverse circulation aerodynamic cavitation method comprises the following steps of: arranging wellhead equipment on a wellhead and sinking a working pipe to a bottom hole; clearly eliminating rock coal dust and water inside the well by using an air compressor in a circulating way; then lifting the working pipe upwards and injecting air / foam by using the air compressor and a supercharger, wherein the air injecting pressure is 3-15 MPa; meanwhile continuously injecting atomized water into the well with the water injecting amount of 3.0-5.0 m<3> each time; opening a hydraulic flat plate gate valve for discharging; after discharging, sinking the working pipe to a coalbed part; injecting the air simultaneously by the air compressor and the supercharger; meanwhile injecting water / foam with the amount of 3.0-10.0 m<3> by using an injection pump for washing the well to thebottom hole; after completing one cycle of discharging and well washing, detecting initial data; closing the air compressor, the supercharger, the injection pump and the hydraulic flat plate gate valve to enable gas inside the well to return freely; measuring the change of gas output of coalbed gas in one hour by using a flow meter; and placing a torch at a discharge port to ignite the gas. The invention improves the construction safety, improves the yield of single well coalbed gas, and saves the construction cost.
Owner:河南省资源环境调查二院

Full-automatic automobile washing device

A full-automatic automobile washing device comprises a spraying device. The spraying device comprises a top spraying rod and vertical spraying rods. The left vertical spraying rod and the right vertical spraying rod are each provided with a plurality of shower nozzles in the vertical direction, and the nozzles of the left vertical spraying rod are opposite to the nozzles of the right vertical spraying rod. Shower nozzles with nozzles facing downwards are distributed on the top spraying rod. The spraying rods are each provided with a switching mechanism, and the shower nozzles can be connected with a high-pressure water source and a high-pressure air source. The switching mechanisms can be in linkage with an output shaft of a switching motor. The top spraying rod, the left vertical spraying rod and the right vertical spraying rod are connected with a beam which is arranged on a guide rail in the manner of sliding forwards and backwards through a driving motor, the top spraying rod can be arranged on the beam in an ascending and descending mode through a lifting motor, the left vertical spraying rod and the right vertical spraying rod can be connected with the beam in the manner of moving left and right through respective motors, and the beam is provided with a detecting device which can detect the size of an automobile body. The full-automatic automobile washing device is ingenious and reasonable in structure, high in automation degree and more complete in function, effectively solves the problems of an existing automobile washing machine, and is a very practical automobile washing device.
Owner:绍兴市中令汽车服务有限公司

Water-based type environment protection cleaning agent and preparation method thereof

The invention relates to a water based environment-friendly cleaning agent and the preparation method, which is characterized in that the agent comprises natural plant extract, degradable surface active agent, inhibiter and de-ionized water. The preparation method is as follows: (1) preparing materials according to the weight ratio, (2) adding the raw material orderly in series, (3) stirring at even pace and (4) evenly mixing to make the finished cleaning agent ultimately. The preparation method for the water based environment-friendly cleaning agent has the advantages of scientific prescription, simple production technique, strong cleaning ability, short cleaning time, low labor and man-hour, high work efficiency, low causticity to the equipment, good safety and low equipment cost. The water based environment-friendly cleaning agent is degradable liquid and can be biologically degraded into harmless material in nature completely. The waste liquid after be cleaned cab be directly discharged without polluting the environment and reach the sewage discharge standard. The water based environment-friendly cleaning agent is provided with the surface active agent and the inhibiter which can form a rustproof protecting film on the metal surface after cleaning, and ensures that the part after cleaning has an advantage of good rust protection.
Owner:北京凯兰航空技术有限公司

Method for recovering valuable metals in waste nickel-cobalt-manganese lithium ion battery by ion exchange method

InactiveCN110527836AAvoid introducingEliminate the evaporation crystallization processIon-exchange process apparatusIon-exchanger regenerationHigh sodiumIon content
The invention relates to a method for recovering the valuable metals in a waste nickel-cobalt-manganese-lithium ion battery by an ion exchange method, which comprises the following steps of disassembling, discharging and crushing the waste nickel-cobalt-manganese-lithium ion battery, leaching, replacing the leachate with nickel powder or cobalt powder to remove the copper, and hydrolyzing with a valuable metal alkali solution as a neutralizer to remove the iron and aluminum; regenerating the chelating resin with a lithium hydroxide solution, adsorbing the nickel, cobalt and manganese in the impurity-removed solution, and backwashing with sulfuric acid to obtain a nickel-cobalt-manganese mixed solution; and recovering the lithium in the liquid after resin adsorption in the form of lithium hydroxide. According to the method, the stripping and leaching of the waste nickel cobalt lithium manganate ion battery are completed in one step, the impurity elements are not introduced during the leachate impurity removal and valuable metal separation and extraction process, the lithium hydroxide used for ion exchange resin is regenerated via the lithium hydroxide, at the same time, the nickel-cobalt-manganese is absorbed, so that the lithium is prevented from being adsorbed and entering a nickel, cobalt and manganese solution to be lost, and the lithium recovery is prevented from being influenced due to the high sodium ion content in the solution with the sodium hydroxide. According to the present invention, the recovery rate of nickel, cobalt and manganese reaches 98% or above, the recovery rate of lithium reaches 90% or above, the technological process is short, the equipment is few, and the cost is low.
Owner:JINCHUAN GROUP LIMITED +1

Automatic cleaning device for inner hole of cylinder cover

The invention discloses an automatic cleaning device for an inner hole of a cylinder cover, which is used for cleaning the inner hole of the cylinder cover. The automatic cleaning device comprises a rack; a cylinder cover cleaning bracket is arranged on the rack; the cylinder cover cleaning bracket is provided with a cylinder cover feeding end and a cylinder cover discharge end; the cylinder cover feeding end and the cylinder cover discharge end are connected with a cylinder cover conveying device respectively; at least one telescopic cleaning device capable of extending to the inner hole of the cylinder cover for cleaning is arranged on the rack; and a telescopic driving device is arranged between the telescopic cleaning device and the rack. The cylinder cover enters the cylinder cover cleaning bracket through the cylinder cover conveying device, and the spray head part of each cleaning device enters the inner hole of the cylinder cover to perform spraying and cleaning, so the cleaning time is short and the cleaning efficiency is high; the cleaning solution is directly sprayed onto the hole wall in the inner hole of the cylinder cover, so the pressure loss of the cleaning solution is extremely low, and the cleaning effect is good; and the whole cleaning process does not need manual operation and has high automation degree. The automatic cleaning device has the advantages of high automation degree, good cleaning effect, high cleaning efficiency and suitability for large-batch production.
Owner:潍坊浩泰机械有限责任公司

Pulse circulation cleaning device for heat exchanger and using method thereof

The invention provides a pulse circulation cleaning device for a heat exchanger and a using method thereof. The pulse circulation cleaning device for the heat exchanger is characterized by comprising a gas buffering tank, a pulse generator, a gas and liquid mixer and a switching valve. The gas buffering tank is used for providing compressed air. An air inlet of the pulse generator is connected with an air outlet of the gas buffering tank. The gas and liquid mixer is provided with a gas phase inlet, a liquid phase inlet and a gas and liquid outlet. The liquid phase inlet is connected with an outlet of a cleaning pump. The switching valve is provided with a water inlet, a drainage opening, a circulating water supply opening and a circulating water return opening. The water inlet is connected with the gas and liquid outlet. The invention further provides a method for using the cleaning device for cleaning the heat exchanger. According to the cleaning device, the gas-liquid pulse cleaning technology, the chemical circulation cleaning technology and the circulation cleaning technology are combined, and therefore the pulse circulation cleaning device has the advantages of being high in cleaning efficiency, good in adaptability, low in cleaning cost, easy and convenient to use and operate and the like, and various heat exchangers can be cleaned without shutting down a unit.
Owner:郑州赛为机电设备有限公司

Cleaning agent for screw extruder and preparation method thereof

The invention provides a cleaning agent for a screw extruder. The cleaning agent is characterized in that the cleaning agent mainly containing an inorganic mineral micro fiber powder body comprises the following ingredients in parts by weight: 50-60 parts of micro fiber powder body, 20-30 parts of inorganic adsorbent, 5-10 parts of activator, 3-5 parts of lubricant and 1-2 parts of dispersant. The invention further provides a preparation method of the cleaning agent for the screw extruder; the method comprises the following steps of micro-dispersing the micro fiber powder body by a vertical jet micro-pulverizer and activating and modifying the by using the activator to obtain a micro fiber brush; and the method is characterized in that the micro fiber brush obtained due to the activation and the modification by using the activator can promote the activator to permeate into the stubborn carbon deposit and dust deposit so as to activate the carbon deposit and the dust deposit, and the inorganic absorbent slightly expands to absorb various activated granular impurities and rapidly remove the impurities out of the screw by adhesion. The cleaning agent has the characteristics of good cleaning effect, high cleaning speed, and no new resin residues, can be applied to the cleaning of the screw extruders in the industries of plastic, rubber, food and the like, and is especially suitable for the cleaning of various types of resin.
Owner:东莞市振大塑胶科技有限公司

Improved bearing cleaning machine allowing inner rings of cleaned bearings to be rotatable

The invention discloses an improved bearing cleaning machine allowing inner rings of cleaned bearings to be rotatable. The improved bearing cleaning machine comprises a barrel, a motor, a partition plate, a rotary plate, a plurality of fixing frames, a plurality of fixing mechanisms, a driving mechanism driving the inner rings of the cleaned bearings to rotate, a pump set, a plurality of sprayers, a third air cylinder, a mounting plate, an upper guide rail, a lower guide rail and a water pipe. The partition plate and the driving mechanism are arranged inside the barrel. The motor is arranged at the bottom of the partition plate. The rotary plate is arranged on a rotary shaft of the motor and located above the partition plate. The fixing frames and the fixing mechanisms for fixing the fixing frames are arranged on the rotary plate. The input end of the pump set communicates with the part, above the partition plate, of the barrel. The output end of the pump set communicates with the water pipe. The sprayers are arranged on the part, inside the barrel, of the water pipe. The third air cylinder is arranged on the front side face of the barrel. The mounting plate is arranged on the part, inside the barrel, of a piston rod of the third air cylinder. The upper guide rail and the lower guide rail are arranged on the mounting plate. Compared with the prior art, the improved bearing cleaning machine is good in cleaning effect, short in cleaning time and convenient to use.
Owner:XINCHANG JIANGBEI BEARING
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