Dynamic measurement device and method for overall performance of hydrostatic pressure guide rail

Abstract

The invention discloses a dynamic measurement device and method for the overall performance of a hydrostatic pressure guide rail. The device comprises a loading unit and a measurement unit which are arranged on a worktable; the loading unit can load the hydrostatic pressure guide rail, and simulate the processing state in the practical work process of the hydrostatic pressure guide rail; the measurement unit comprises a displacement measurement assembly used for detecting the variation quantity of the displacement of the hydrostatic pressure guide rail and two grating rulers; one grating ruleris used for feeding back and controlling the position of the hydrostatic pressure guide rail; and the other grating ruler is used for measuring the position and speed of the hydrostatic pressure guide rail. The method is implemented based on the device, and is capable of dynamically measuring the positioning precision, the movement stability, the movement straightness in the horizontal and vertical directions and the static rigidity in the corresponding directions of the dynamic hydrostatic pressure guide rail. By means of the device and method, the hydrostatic pressure guide rail can be easily disassembled, assembled and replaced; the universality is high; the dynamic measurement of the corresponding indexes can be uniformly carried out; the measurement period can be shortened; and the reference value of the measurement result can be improved.

Description

technical field [0001] The invention relates to the technical field of comprehensive performance testing of key functional components of an ultra-precision machine tool, in particular to a dynamic measurement device and method for the comprehensive performance of a hydrostatic guide rail. Background technique [0002] As an important functional part of ultra-precision machine tools, hydrostatic guide rails have the characteristics of high rigidity, good repeatability, and stable operation. They are mainly used in the feed motion and low-speed motion of precision and ultra-precision machine tools. The comprehensive performance of the hydrostatic guideway includes performance indicators such as straightness, positioning accuracy, stiffness, temperature rise, speed stability, and vibration. Among them, straightness, positioning accuracy and other indicators are key factors affecting the processing quality of ultra-precision machine tool workpieces; speed stability The rigidity ...

AI Technical Summary

Problems solved by technology

[0003] However, various domestic manufacturers measure the above-mentioned key indicators of the comprehensive performance of the hydrostatic guideway separately, and do not conduct them on one device or one piece of equipment, resulting in too long measurement periods, and most of them use static measurement methods. , resulting in inaccurate measurement results and large errors, the reference value is not high

[0004] The Chinese invention patent with the application number 201910417880.5 discloses a real-time measurement device and method for the steady-state performance of hydrostatic guide rails. Accurate measurement, but to achieve this purpose, it is necessary to process and install corresponding test components, test modules, and channels or holes to facilitate testing of test pieces on the hydrostatic rail of the test, which can only be used for a very limited type of dedicated hydrostatic pressure Guide rail for measurement, resulting in extremely poor universality of the entire device

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