Mechanical vacuum pump unit with refrigeration equipment
A technology of mechanical vacuum pumps and refrigeration equipment, which is applied in mechanical equipment, machines/engines, lighting and heating equipment, etc. It can solve the problems of Roots vacuum pump explosion, gas temperature rise, jamming, etc., to ensure space heat dissipation and cooling heat dissipation Effect
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[0017] A kind of mechanical vacuum pump unit with refrigeration equipment of the present invention, as figure 1 As shown, it includes: three-stage Roots vacuum pump groups, Roots vacuum pumps connected by multiple parallel pipelines in all levels of Roots vacuum pump groups; Roots vacuum pump groups at all levels are connected in series from front to back to form gas circulation channel.
[0018] The first-stage Roots vacuum pump group 1 at the front end is connected with the vacuum tank 4 through pipelines, and is used for sucking the gas in the vacuum tank 4 .
[0019] The gas cooler 9 is connected in series on the series pipeline between the second-stage Roots vacuum pump group 7 and the third-stage Roots vacuum pump group 11; the gas cooler 9 is used to cool down the gas output by the second-stage Roots vacuum pump group 7, And the cooled gas is delivered to the three-stage Roots vacuum pump group 11.
[0020] The front-stage vacuum pump group 13 is composed of a plurali...
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