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Metal mask

A metal mask and metal sheet technology, applied in the mask field, can solve the problems of easy warping and affect the coating quality, and achieve the effect of ensuring the quality and improving the problem that the tip is too sharp and easy to warp.

Active Publication Date: 2021-03-30
FINEMAT APPLIED MATERIALS +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The technical problem to be solved by the present invention is to provide a metal mask to solve the problem that the surrounding wall of the acute-angled hole in the existing metal mask is easily warped and affects the quality of the coating film.

Method used

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Embodiment Construction

[0037] The technical means adopted by the present invention to achieve the intended invention purpose are further described below in conjunction with the drawings and preferred embodiments of the present invention.

[0038] Such as figure 1 As shown, a preferred embodiment of the metal mask of the present invention is disclosed. As can be seen from the accompanying drawings, the metal mask includes a thin metal plate 10. In this preferred embodiment, the thickness of the metal plate 10 is H0 is about 15 μm to 300 μm, and the material of the metal plate 10 can be a metal plate with a low expansion coefficient such as nickel-iron alloy, but not limited thereto.

[0039] The opposite sides of the metal plate 10 are respectively the deposition material receiving side 101 and the substrate receiving side 102, and the metal plate 10 includes at least one plated film hole 11, at least one groove 12 and at least one passivation hole 13, when said When there are multiple coating hole...

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Abstract

The invention relates to a metal mask. At least one coating hole, grooves and passivation holes are formed in a thin metal plate, the number and positions of the grooves and the passivation holes correspond to the number and positions of the coating holes, the coating holes extend from a deposition material receiving side of the metal plate to a substrate receiving side, and the grooves are formedin the substrate receiving side of the metal plate. The passivation holes extend from the groove bottom surfaces of the grooves and communicate with the coating holes, so that coating hole positionswith passivation tips are formed by combining the coating holes and the passivation holes which are inclined in different directions, and therefore, the metal mask has the function of preventing the tips of the coating hole positions from deforming by controlling the oblique angle of the coating holes, the passivation holes combined with the coating holes and other geometrical shapes, and the coating quality is ensured.

Description

technical field [0001] The invention relates to a mask, in particular to a metal mask with a masking function used in a coating process to assist the formation of a coating layer with a specific pattern on the surface of an object to be plated. Background technique [0002] At present, in the organic light-emitting diode (OLED) display industry, the organic light-emitting material used in it needs to be realized by evaporation, and the coating layer material needs to be assisted by a mask to form a geometric circuit. With the continuous improvement of the yield rate of the OLED coating process, in addition to requiring the accuracy of the relevant fixture size, it is also necessary to pass protection during the operation process to avoid damage to the coated product due to unnecessary contact, which is the current OLED coating process. One of the main directions of effort in the field. [0003] Generally speaking, the metal mask used in the OLED evaporation process is mainl...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/042C23C14/24
Inventor 李仲仁赖元章萧育展卢世宗
Owner FINEMAT APPLIED MATERIALS
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