Low-temperature and constant-temperature liquid circulating device and dewatering method thereof

Abstract

The invention relates to the technical field of low temperature and constant temperature, and discloses a low-temperature and constant-temperature liquid circulating device and a dewatering method thereof. According to the low-temperature and constant-temperature liquid circulating device and the dewatering method thereof, on one hand, an ice crystal filter and a plurality of stop valves are additionally arranged in a circulating liquid loop, so that a pair of parallel standby branch and common branch can be formed, when circulating liquid flows through the common branch where the ice crystal filter is located, mixed water can be effectively intercepted and collected due to the fact that the water is frozen into ice cubes, the phenomena that a capillary pipeline in a temperature control liquid pipeline is blocked in the follow-up circulating process, and component cooling faults are caused can be solved, the temperature control stability is guaranteed, on the other hand, a heater, an exhaust connector, a nitrogen connector and a plurality of valves are continuously and additionally arranged for the ice crystal filter, when the standby branch is switched to replace the common branch to keep the circulating liquid loop to be connected, water in the ice crystal filter can be heated and purged in an isolated mode, and therefore on the premise that the circulating liquid loop is not interrupted, the maintenance time can be shortened, the maintenance operation can be reduced, and the equipment productivity loss can be reduced.

Description

technical field [0001] The invention belongs to the technical field of low temperature constant temperature, and in particular relates to a low temperature constant temperature liquid circulation device and a water removal method thereof. Background technique [0002] In a typical semiconductor manufacturing process, products need to be processed in process equipment to complete key processes. Different process equipment requires different temperature environments (for example, high plasma density etching process usually requires a low temperature environment of -10 to -20 degrees Celsius, and even some very few processes require a harsh environment of -100 degrees Celsius), among which process equipment The low temperature environment is usually provided by the low temperature constant temperature liquid circulation device connected to the temperature control liquid pipeline in the process equipment. Such as figure 1 As shown, the existing low-temperature constant tempera...

AI Technical Summary

Problems solved by technology

[0006] In order to solve the problem that the existing low temperature constant temperature liquid circulation device is easy to mix water in the circulating liquid and water removal will lead to long maintenance time, many maintenance operations and loss of equipment production capacity, the purpose of the present invention is to provide a new low temperature constant temperature liquid circulation Device and method for removing water

Images